Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7550043 | Substrate processing method and substrate processing apparatus | Masatoshi Shiraishi, Masatsugu Nakama | 2009-06-23 |
| 6962477 | Apparatus for and method of transferring substrates | Kiyohisa Tateyama | 2005-11-08 |
| 6837672 | Apparatus for and method of transferring substrates | Kiyohisa Tateyama | 2005-01-04 |
| 6635113 | Coating apparatus and coating method | Noriyuki Anai, Masafumi Nomura, Kiyohisa Tateyama, Tsutae Omori | 2003-10-21 |
| 6485782 | Coating film forming method and coating apparatus | — | 2002-11-26 |
| 6451515 | Substrate treating method | Kiyohisa Tateyama, Kengo Mizosaki, Noriyuki Anai, Yoshitaka Matsuda | 2002-09-17 |
| 6447608 | Spin coating apparatus | Mitsuhiro Sakai, Masafumi Nomura | 2002-09-10 |
| 6443641 | Substrate process method and substrate process apparatus | Kiyohisa Tateyama, Kengo Mizosaki, Noriyuki Anai, Mitsuhiro Sakai, Shinobu Tanaka +2 more | 2002-09-03 |
| 6319317 | Coating film forming method and coating apparatus | — | 2001-11-20 |
| 6306455 | Substrate processing method | Masafumi Nomura, Tsutae Omori | 2001-10-23 |
| 6264748 | Substrate processing apparatus | Yasuyuki Kuriki, Kozo Hara | 2001-07-24 |
| 6261007 | Substrate process method and substrate process apparatus | Kiyohisa Tateyama, Kengo Mizosaki, Noriyuki Anai, Mitsuhiro Sakai, Shinobu Tanaka +2 more | 2001-07-17 |
| 6159541 | Spin coating process | Mitsuhiro Sakai, Masafumi Nomura | 2000-12-12 |
| 6152677 | Apparatus for and method of transferring substrates | Kiyohisa Tateyama | 2000-11-28 |
| 5514852 | Heat treatment device | Takami Satoh | 1996-05-07 |
| 5416047 | Method for applying process solution to substrates | Nobuo Konishi, Masami Akimoto, Kiyohisa Tateyama, Masaaki Murakami, Norimitsu Morioka +1 more | 1995-05-16 |
| 5250114 | Coating apparatus with nozzle moving means | Nobuo Konishi, Masami Akimoto, Kiyohisa Tateyama | 1993-10-05 |