YK

Yasuyuki Kuriki

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
Overall (All Time): #2,228,931 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6264748 Substrate processing apparatus Hideyuki Takamori, Kozo Hara 2001-07-24
5716451 Plasma processing apparatus Kiichi Hama, Toshiaki Hongoh 1998-02-10