Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7569497 | Method and apparatus for forming insulating layer | Satohiko Hoshino | 2009-08-04 |
| 7018506 | Plasma processing apparatus | Naoki Matsumoto, Chishio Koshimizu | 2006-03-28 |
| RE39020 | Plasma process apparatus | Kiichi Hama, Jiro Hata | 2006-03-21 |
| 6797111 | Plasma processing apparatus | Tetsu Osawa | 2004-09-28 |
| 6736930 | Microwave plasma processing apparatus for controlling a temperature of a wavelength reducing member | — | 2004-05-18 |
| 6675737 | Plasma processing apparatus | Tetsu Osawa, Masaki Hirayama, Tadahiro Ohmi | 2004-01-13 |
| 6470824 | Semiconductor manufacturing apparatus | Satoru Kawakami, Shigemi Murakawa, Mitsuhiro Yuasa | 2002-10-29 |
| 6399520 | Semiconductor manufacturing method and semiconductor manufacturing apparatus | Satoru Kawakami, Shigemi Murakawa, Mitsuhiro Yuasa | 2002-06-04 |
| 6358324 | Microwave plasma processing apparatus having a vacuum pump located under a susceptor | Tetsu Oosawa, Satoru Kawakami, Mitsuhiro Yuasa | 2002-03-19 |
| 6343565 | Flat antenna having rounded slot openings and plasma processing apparatus using the flat antenna | — | 2002-02-05 |
| 6325018 | Flat antenna having openings provided with conductive materials accommodated therein and plasma processing apparatus using the flat antenna | — | 2001-12-04 |
| 5792261 | Plasma process apparatus | Kiichi Hama, Jiro Hata | 1998-08-11 |
| 5716451 | Plasma processing apparatus | Kiichi Hama, Yasuyuki Kuriki | 1998-02-10 |
| 5525159 | Plasma process apparatus | Kiichi Hama, Jiro Hata | 1996-06-11 |
| 5179498 | Electrostatic chuck device | Masaki Kondo | 1993-01-12 |