Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6358324 | Microwave plasma processing apparatus having a vacuum pump located under a susceptor | Toshiaki Hongoh, Satoru Kawakami, Mitsuhiro Yuasa | 2002-03-19 |
| 6032083 | Substrate transfer apparatus and heat treatment system using the same | — | 2000-02-29 |
| 5984607 | Transfer apparatus, transfer method, treatment apparatus and treatment method | Harunori Ushikawa | 1999-11-16 |
| 5445486 | Substrate transferring apparatus | Hirofumi Kitayama, Hiroyuki Iwai, Shinichi Wada | 1995-08-29 |
| 5435683 | Load-lock unit and wafer transfer system | Teruo Asakawa, Kenji Nebuka, Hiroo Ono | 1995-07-25 |
| 5405230 | Load-lock unit and wafer transfer system | Hiroo Ono, Teruo Asakawa, Kenji Nebuka | 1995-04-11 |
| 5340261 | Load-lock unit and wafer transfer system | Teruo Asakawa, Kenji Nebuka, Hiroo Ono | 1994-08-23 |