Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7235137 | Conductor treating single-wafer type treating device and method for semi-conductor treating | Noriaki Matsushima | 2007-06-26 |
| 6360762 | Method for feeding gases for use in semiconductor manufacturing | Yoichi Kurono, Nobukazu Ikeda, Naoya Masuda | 2002-03-26 |
| 6210482 | Apparatus for feeding gases for use in semiconductor manufacturing | Yoichi Kurono, Nobukazu Ikeda, Naoya Masuda | 2001-04-03 |
| 6095806 | Semiconductor wafer boat and vertical heat treating system | Shizuo Suzuki, Hisashi Kitamiya | 2000-08-01 |
| 5622639 | Heat treating apparatus | Toshimitu Shibata, Toshiaki Miyaju, Katsushin Miyagi | 1997-04-22 |
| D378823 | Wafer boat | Shingo Watanabe | 1997-04-15 |
| 5445521 | Heat treating method and device | Eiji Yamaguchi, Kaoru Fujihara, Takenobu Matsuo | 1995-08-29 |
| 5445486 | Substrate transferring apparatus | Hiroyuki Iwai, Shinichi Wada, Tetsu Oosawa | 1995-08-29 |
| 5316472 | Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus | Reiji Niino, Isao Siratani, Yutaka Simada, Hiroki Fukusima, Akimichi Yonekura +1 more | 1994-05-31 |
| 5217501 | Vertical wafer heat treatment apparatus having dual load lock chambers | Noboru Fuse, Hisashi Hattori | 1993-06-08 |
| 5162047 | Vertical heat treatment apparatus having wafer transfer mechanism and method for transferring wafers | Atsushi Wada | 1992-11-10 |
| 5110248 | Vertical heat-treatment apparatus having a wafer transfer mechanism | Takanobu Asano, Hiroyuki Iwai, Yuuji Ono | 1992-05-05 |
| 5030056 | Substrate transfer device | Mitsuo Kato, Eiichiro Takanabe, Masaru Kobayashi | 1991-07-09 |
| 4989540 | Apparatus for reaction treatment | Noboru Fuse | 1991-02-05 |