Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402848 | Single-substrate-treating apparatus for semiconductor processing system | Takahiro Horiguchi, Wataru Okase | 2002-06-11 |
| 5775889 | Heat treatment process for preventing slips in semiconductor wafers | Junichi Kobayashi, Harunori Ushikawa, Tomohisa Shimazu | 1998-07-07 |
| 5688116 | Heat treatment process | Junichi Kobayashi | 1997-11-18 |
| 5388944 | Vertical heat-treating apparatus and heat-treating process by using the vertical heat-treating apparatus | Takeo Suzuki, Tadataka Noguchi | 1995-02-14 |
| 5277579 | Wafers transferring method in vertical type heat treatment apparatus and the vertical type heat treatment apparatus provided with a wafers transferring system | — | 1994-01-11 |
| 5030056 | Substrate transfer device | Hirofumi Kitayama, Mitsuo Kato, Masaru Kobayashi | 1991-07-09 |
| 5016567 | Apparatus for treatment using gas | Katsuhiko Iwabuchi, Osamu Yokokawa | 1991-05-21 |