Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8434522 | Fluid control apparatus | Shuji Moriya, Tomohiro Nakata, Tsutomu Shinohara, Michio Yamaji | 2013-05-07 |
| 8381755 | Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same | Shuji Moriya, Tsutomu Shinohara, Nobukazu Ikeda, Michio Yamaji, Yasutaka Hayashi +2 more | 2013-02-26 |
| 8210022 | Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same | Shuji Moriya, Tsutomu Shinohara, Nobukazu Ikeda, Michio Yamaji, Yasutaka Hayashi +2 more | 2012-07-03 |
| 7112268 | Plating device and plating method | Takenobu Matsuo | 2006-09-26 |
| 6953522 | Liquid treatment method using alternating electrical contacts | Kyungho Park, Takenobu Matsuo | 2005-10-11 |
| 6949719 | Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator | Osamu Suenaga, Takenobu Matsuo | 2005-09-27 |
| 6756565 | Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator | Osamu Suenaga, Takenobu Matsuo | 2004-06-29 |
| 6740164 | Plating apparatus and method of manufacturing semiconductor device | Takenobu Matsuo | 2004-05-25 |
| 6716329 | Processing apparatus and processing system | Takenobu Matsuo | 2004-04-06 |
| 6641709 | Mist trap mechanism and method for plating apparatus | Koichiro Kimura, Takenobu Matsuo | 2003-11-04 |
| 6634370 | Liquid treatment system and liquid treatment method | Satoshi Nakashima, Takenobu Matsuo, Tameyasu Hyakuzuka, Yasushi Yagi, Yoshiyuki Harima +6 more | 2003-10-21 |
| 6497767 | Thermal processing unit for single substrate | Yasushi Yagi | 2002-12-24 |
| 6473993 | Thermal treatment method and apparatus | Yasushi Yagi, Takeshi Sakuma, Masayuki Kitamura, Hironori Yagi, Eisuke Morisaki | 2002-11-05 |
| 6402848 | Single-substrate-treating apparatus for semiconductor processing system | Takahiro Horiguchi, Eiichiro Takanabe | 2002-06-11 |
| 6399922 | Single-substrate-heat-treating apparatus for semiconductor process system | Masaaki Hasei | 2002-06-04 |
| 6322631 | Heat treatment method and its apparatus | — | 2001-11-27 |
| 6228173 | Single-substrate-heat-treating apparatus for semiconductor process system | Masaaki Hasei | 2001-05-08 |
| 6121579 | Heating apparatus, and processing apparatus | Kazutsugu Aoki, Hironori Yagi, Masamichi Nomura | 2000-09-19 |
| 6036482 | Heat treatment method | — | 2000-03-14 |
| 5903711 | Heat treatment apparatus and heat treatment method | — | 1999-05-11 |
| 5884009 | Substrate treatment system | — | 1999-03-16 |
| 5862302 | Thermal processing apparatus having a reaction tube with transparent and opaque portions | — | 1999-01-19 |
| 5749723 | Heat treatment apparatus | — | 1998-05-12 |
| 5678989 | Heat treatment method using a vertical processing tube | — | 1997-10-21 |
| 5662469 | Heat treatment method | Yasushi Yagi, Satoshi Kawachi | 1997-09-02 |