Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7112268 | Plating device and plating method | Wataru Okase | 2006-09-26 |
| 6953522 | Liquid treatment method using alternating electrical contacts | Kyungho Park, Wataru Okase | 2005-10-11 |
| 6949719 | Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator | Osamu Suenaga, Wataru Okase | 2005-09-27 |
| 6756565 | Thermal insulator having a honeycomb structure and heat recycle system using the thermal insulator | Osamu Suenaga, Wataru Okase | 2004-06-29 |
| 6740164 | Plating apparatus and method of manufacturing semiconductor device | Wataru Okase | 2004-05-25 |
| 6716329 | Processing apparatus and processing system | Wataru Okase | 2004-04-06 |
| 6641709 | Mist trap mechanism and method for plating apparatus | Wataru Okase, Koichiro Kimura | 2003-11-04 |
| 6634370 | Liquid treatment system and liquid treatment method | Satoshi Nakashima, Wataru Okase, Tameyasu Hyakuzuka, Yasushi Yagi, Yoshiyuki Harima +6 more | 2003-10-21 |
| 6403498 | Method and device for treating substrate | Tsuyoshi Wakabayashi, Teruyuki Hayashi, Misako Saito | 2002-06-11 |
| 6337365 | Electronic/electric components used in clean room and substrate treatment apparatus | Tsuyoshi Wakabayashi, Misako Saito, Sadao Kobayashi, Yoshihide Wakayama, Masayuki Imafuku | 2002-01-08 |
| 6077894 | Instrument and mounting equipment used in clean room | Misako Saito, Tsuyoshi Wakabayashi, Sadao Kobayashi, Yoshihide Wakayama, Masayuki Imafuku | 2000-06-20 |
| 5853803 | Resist processing method and apparatus | Kiyohisa Tateyama, Kimio Motoda, Tatsuya Iwasaki, Kazuki Denpoh, Eiji Yamaguchi | 1998-12-29 |
| 5718763 | Resist processing apparatus for a rectangular substrate | Kiyohisa Tateyama, Kimio Motoda, Tatsuya Iwasaki, Kazuki Denpoh, Eiji Yamaguchi | 1998-02-17 |
| 5514196 | Air cleaning apparatus | Takashi Tanahashi, Syuji Moriya, Tsuyoshi Wakabayashi | 1996-05-07 |
| 5445521 | Heat treating method and device | Eiji Yamaguchi, Kaoru Fujihara, Hirofumi Kitayama | 1995-08-29 |
| 5441076 | Processing apparatus using gas | Shuji Moriya, Tsuyoshi Wakabayashi, Kazutoshi Miura, Takahiro Mori | 1995-08-15 |
| 5439026 | Processing apparatus and flow control arrangement therefor | Shuji Moriya, Tsuyoshi Wakabayashi | 1995-08-08 |
| 5421365 | Flow control apparatus | Tsuyoshi Wakabayashi, Shuji Moriya | 1995-06-06 |
| 5359148 | Heat-treating apparatus | Wataru Okase, Takashi Tanahashi | 1994-10-25 |
| 5307568 | Gas supply system | Tsuyoshi Wakabayashi, Shjui Moriya | 1994-05-03 |
| 5294280 | Gas measuring device and processing apparatus provided with the gas measuring device | Tsuyoshi Wakabayashi, Shuji Moriya, Hidenobu Arimitsu | 1994-03-15 |