Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960056 | Substrate cleaning method, substrate cleaning apparatus and vacuum processing system | Kazuya Dobashi, Kensuke Inai | 2018-05-01 |
| 9881815 | Substrate cleaning method, substrate cleaning device, and vacuum processing device | Jiro Matsuo, Toshio Seki, Takaaki Aoki, Kazuya Dobashi, Kensuke Inai | 2018-01-30 |
| 9875915 | Method for removing metal contamination and apparatus for removing metal contamination | Yudai ITO, Kazuya Dobashi, Shigeyoshi Kojima, Hideki Nishimura | 2018-01-23 |
| 8911955 | Virus detection device and virus detection method | Akitake Tamura, Kaoru Fujihara | 2014-12-16 |
| 8268185 | Method for analyzing quartz member | Kazuya Dobashi, Teruyuki Hayashi, Kohei Tsugita | 2012-09-18 |
| 8040504 | Defect inspecting method and defect inspecting apparatus | Teruyuki Hayashi, Kaoru Fujiwara | 2011-10-18 |
| 7993458 | Vacuum processing apparatus and method | Masaki Kondo, Teruyuki Hayashi | 2011-08-09 |
| 7946152 | Apparatus and method for measuring the concentration of organic gas | Teruyuki Hayashi | 2011-05-24 |
| 7420118 | Electric wire and cable with coating/covering of polyvinyl chloride family resin composition | Kiyoshi Watanabe, Hiroyuki Ito, Teruyuki Hayashi, Naoya Hirayama, Sadao Kobayashi +1 more | 2008-09-02 |
| 7208428 | Method and apparatus for treating article to be treated | Shingo Hishiya, Yoshikazu Furusawa, Teruyuki Hayashi, Kota Umezawa, Syoichi Sato | 2007-04-24 |
| 6903264 | Electric wire coated with polyvinyl chloride resin composition and cable | Kiyoshi Watanabe, Hiroyuki Ito, Teruyuki Hayashi, Naoya Hirayama, Sadao Kobayashi +1 more | 2005-06-07 |
| 6537347 | Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, chemical filter unit, and semiconductor manufacturing apparatus | Satoshi Motouji, Iichi Hirao, Teruyuki Hayashi | 2003-03-25 |
| 6403498 | Method and device for treating substrate | Takenobu Matsuo, Tsuyoshi Wakabayashi, Teruyuki Hayashi | 2002-06-11 |
| 6337365 | Electronic/electric components used in clean room and substrate treatment apparatus | Takenobu Matsuo, Tsuyoshi Wakabayashi, Sadao Kobayashi, Yoshihide Wakayama, Masayuki Imafuku | 2002-01-08 |
| 6077894 | Instrument and mounting equipment used in clean room | Takenobu Matsuo, Tsuyoshi Wakabayashi, Sadao Kobayashi, Yoshihide Wakayama, Masayuki Imafuku | 2000-06-20 |