Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334380 | Boat transfer method and heat treatment apparatus | Hiroaki Ikegawa, Volker Hemel, Bernhard Zobel, Sung Duk SON | 2025-06-17 |
| 12018366 | Substrate processing apparatus and cleaning method | Sung Duk SON | 2024-06-25 |
| 11786946 | Cleaning method and film forming apparatus | Sung Duk SON, Akinobu Kakimoto | 2023-10-17 |
| 11725281 | Gas introduction structure, thermal processing apparatus and gas supply method | Sung Duk SON, Masayuki Kitamura, Satoru Ogawa | 2023-08-15 |
| 10968515 | Vertical heat treatment apparatus | Eiji Kikama, Hiromi Shima, Kyungseok Ko, Keisuke Suzuki, Tosihiko Jo +2 more | 2021-04-06 |
| 10964530 | Method of forming blocking silicon oxide film, and storage medium | Kyungseok Ko, Hiromi Shima, Eiji Kikama, Keisuke Suzuki | 2021-03-30 |
| 10553686 | Method and apparatus for forming silicon oxide film, and storage medium | Kyungseok Ko, Hiromi Shima, Eiji Kikama | 2020-02-04 |
| 9776202 | Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus | Yutaka Motoyama, Keisuke Suzuki, Kohei Fukushima | 2017-10-03 |
| 9562285 | Film forming method, film forming apparatus and storage medium | Keisuke Suzuki, Hiroki Murakami, Kentaro Kadonaga, Minoru Obata | 2017-02-07 |
| 8896097 | Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor | Yu Wamura, Koji Akiyama, Katsushige Harada | 2014-11-25 |
| 8815112 | Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatus | Tsuyoshi Mizuno, Hiromitsu Namba, Yuichiro Morozumi, Katsushige Harada, Fumiaki Hayase | 2014-08-26 |
| 8735304 | Film forming method, film forming apparatus, and storage medium | Yuichiro Morozumi, Takuya Sugawara, Koji Akiyama, Toshiyuki Hirota, Takakazu Kiyomura | 2014-05-27 |
| 8642127 | Method of forming titanium nitride film | Yuichiro Morozumi, Katsushige Harada | 2014-02-04 |
| 8389421 | Film formation method and film formation apparatus | Katsushige Harada, Yuichiro Morozumi | 2013-03-05 |
| 8288241 | Semiconductor device, method of manufacturing the same and adsorption site blocking atomic layer deposition method | Toshiyuki Hirota, Takakazu Kiyomura, Yuichiro Morozumi | 2012-10-16 |
| 8216378 | Reaction tube and heat processing apparatus for a semiconductor process | Hirofumi Kaneko, Hisashi Inoue, Keishi Shionaga, Atsushi Endoh | 2012-07-10 |
| 8122850 | Method and apparatus for processing polysilazane film | Kimiya Aoki, Masahisa Watanabe | 2012-02-28 |
| 7563481 | Method and apparatus for processing polysilazane film | Kimiya Aoki, Masahisa Watanabe | 2009-07-21 |
| 7465682 | Method and apparatus for processing organosiloxane film | — | 2008-12-16 |
| 7259026 | Method and apparatus for processing organosiloxane film | — | 2007-08-21 |
| 7208428 | Method and apparatus for treating article to be treated | Yoshikazu Furusawa, Teruyuki Hayashi, Misako Saito, Kota Umezawa, Syoichi Sato | 2007-04-24 |
| 7064084 | Oxide film forming method | Koji Akiyama, Yoshikazu Furusawa, Kimiya Aoki | 2006-06-20 |
| 6821566 | Method and apparatus for forming insulating film containing silicon oxy-nitride | Genji Nakamura, Yoshihide Tada, Masayuki Imai, Asami Suemura | 2004-11-23 |