Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10968515 | Vertical heat treatment apparatus | Eiji Kikama, Hiromi Shima, Shingo Hishiya, Keisuke Suzuki, Tosihiko Jo +2 more | 2021-04-06 |
| 10964530 | Method of forming blocking silicon oxide film, and storage medium | Hiromi Shima, Eiji Kikama, Keisuke Suzuki, Shingo Hishiya | 2021-03-30 |
| 10781515 | Film-forming method and film-forming apparatus | Hiromi Shima, Eiji Kikama, Keisuke Suzuki | 2020-09-22 |
| 10636649 | Method and apparatus for forming silicon oxide film on tungsten film | Koji Sasaki, Toshiyuki Ikeuchi | 2020-04-28 |
| 10553686 | Method and apparatus for forming silicon oxide film, and storage medium | Hiromi Shima, Eiji Kikama, Shingo Hishiya | 2020-02-04 |