Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10968515 | Vertical heat treatment apparatus | Eiji Kikama, Kyungseok Ko, Shingo Hishiya, Keisuke Suzuki, Tosihiko Jo +2 more | 2021-04-06 |
| 10964530 | Method of forming blocking silicon oxide film, and storage medium | Kyungseok Ko, Eiji Kikama, Keisuke Suzuki, Shingo Hishiya | 2021-03-30 |
| 10781515 | Film-forming method and film-forming apparatus | Kyungseok Ko, Eiji Kikama, Keisuke Suzuki | 2020-09-22 |
| 10553686 | Method and apparatus for forming silicon oxide film, and storage medium | Kyungseok Ko, Eiji Kikama, Shingo Hishiya | 2020-02-04 |
| 9758867 | Method of controlling gas supply apparatus and substrate processing system | Shigeru Nakajima, Yusuke TACHINO | 2017-09-12 |
| 9748065 | Sealed contact device | Masaki Mori, Takuma Okamoto | 2017-08-29 |
| 9640448 | Film forming method, film forming apparatus, and storage medium | Hiroaki Ikegawa, Yusuke TACHINO | 2017-05-02 |
| 9552948 | Sealed contact device and method of manufacturing the same | Masaki Mori, Takuma Okamoto | 2017-01-24 |
| 9422624 | Heat treatment method | Shigeru Nakajima, Yusuke TACHINO | 2016-08-23 |
| 7307499 | High-frequency relay | Masanori Nakamura, Mitsuhiro Kawai, Kazumi Sako, Toshifumi Sumino | 2007-12-11 |
| 6781489 | High-frequency relay | Mitsuhiro Kawai, Masanori Nakamura, Toshifumi Sumino | 2004-08-24 |
| 4812712 | Plasma processing apparatus | Youichi Ohnishi, Akira Okuda, Shinichi Mizuguchi | 1989-03-14 |