Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11486043 | Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor | Yoshihiro TAKEZAWA, Shigeru Nakajima, Katsushige Harada | 2022-11-01 |
| 9758867 | Method of controlling gas supply apparatus and substrate processing system | Shigeru Nakajima, Hiromi Shima | 2017-09-12 |
| 9640448 | Film forming method, film forming apparatus, and storage medium | Hiroaki Ikegawa, Hiromi Shima | 2017-05-02 |
| 9422624 | Heat treatment method | Shigeru Nakajima, Hiromi Shima | 2016-08-23 |