Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11486043 | Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor | Yoshihiro TAKEZAWA, Shigeru Nakajima, Yusuke TACHINO | 2022-11-01 |
| 9574269 | Method and apparatus for forming thin film | Susumu Takada | 2017-02-21 |
| 9293543 | Film forming method and film forming apparatus | Shuji AZUMO, Yusaku Kashiwagi, Yuichiro Morozumi, Yu Wamura, Kosuke Takahashi +3 more | 2016-03-22 |
| 9234275 | Method and apparatus of forming metal compound film, and electronic product | Yoshihiro TAKEZAWA | 2016-01-12 |
| 9230799 | Method for fabricating semiconductor device and the semiconductor device | Akinobu Teramoto, Hiroshi Kambayashi, Hirokazu Ueda, Yuichiro Morozumi, Kazuhide Hasebe +1 more | 2016-01-05 |
| 8896097 | Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor | Yu Wamura, Koji Akiyama, Shingo Hishiya | 2014-11-25 |
| 8815112 | Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatus | Tsuyoshi Mizuno, Hiromitsu Namba, Yuichiro Morozumi, Shingo Hishiya, Fumiaki Hayase | 2014-08-26 |
| 8642127 | Method of forming titanium nitride film | Yuichiro Morozumi, Shingo Hishiya | 2014-02-04 |
| 8389421 | Film formation method and film formation apparatus | Yuichiro Morozumi, Shingo Hishiya | 2013-03-05 |
| 8336487 | Film forming apparatus | Yoshihiro Ishida, Takuya Sugawara | 2012-12-25 |
| 7968472 | Film forming method and film forming apparatus | Yoshihiro Ishida, Takuya Sugawara | 2011-06-28 |
| 7368384 | Film formation apparatus and method of using the same | Atsushi Endo, Tomonori Fujiwara, Yuichiro Morozumi, Shigeru Nakajima, Dong-Kyun Choi +2 more | 2008-05-06 |
| 7041546 | Film forming method for depositing a plurality of high-k dielectric films | Yuichiro Morozumi, Kazuhide Hasebe, Shigeru Nakajima, Haruhiko Furuya, Dong-Kyun Choi +3 more | 2006-05-09 |