Issued Patents All Time
Showing 1–25 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495452 | Method for producing silicon nitride film | Yoshinobu Shiba, Takashi Abe, Akira Nishimura | 2022-11-08 |
| 10927454 | Method of forming nitride film | Shinichi Nishimura, Kensuke Watanabe, Yoshihito Yamada, Tomoyuki Suwa, Yoshinobu Shiba | 2021-02-23 |
| 10559460 | Film forming apparatus and film forming method | Akira Shimizu, Katsutoshi Ishii, Tomoyuki Suwa, Yoshinobu Shiba | 2020-02-11 |
| 10043654 | Method for rinsing compound semiconductor, solution for rinsing compound semiconductor containing gallium as constituent element, method for fabricating compound semiconductor device, method for fabricating gallium nitride substrate, and gallium nitride substrate | Kenji Nagao, Kenichi Nakamura | 2018-08-07 |
| 9875899 | Semiconductor transistor | Hiroshi Kambayashi, Katsunori Ueno, Takehiko Nomura, Yoshihiro Sato, Tadahiro Ohmi | 2018-01-23 |
| 9543191 | Wiring structure having interlayer insulating film and wiring line without a barrier layer between | Takenao Nemoto, Takehisa Saito, Yugo Tomita, Hirokazu Matsumoto, Akihide Shirotori +1 more | 2017-01-10 |
| 9299844 | Accumulation-mode MOSFET and driving method thereof | — | 2016-03-29 |
| 9230799 | Method for fabricating semiconductor device and the semiconductor device | Hiroshi Kambayashi, Hirokazu Ueda, Yuichiro Morozumi, Katsushige Harada, Kazuhide Hasebe +1 more | 2016-01-05 |
| 9157681 | Surface treatment method for atomically flattening a silicon wafer and heat treatment apparatus | Tadahiro Ohmi, Tomoyuki Suwa | 2015-10-13 |
| 9153658 | Semiconductor device and method of manufacturing the same | Rihito Kuroda, Shigetoshi Sugawa | 2015-10-06 |
| 8999788 | Manufacturing method of GaN-based semiconductor device and semiconductor device | Hiroshi Kambayashi, Tadahiro Ohmi | 2015-04-07 |
| 8906796 | Method of producing semiconductor transistor | Hiroshi Kambayashi, Tadahiro Ohmi | 2014-12-09 |
| 8895410 | Method of manufacturing semiconductor device and semiconductor manufacturing apparatus | Tadahiro Ohmi, Hiroshi Akahori | 2014-11-25 |
| 8841545 | Solar cell wherein solar photovolatic thin film is directly formed on base | Yoshihide Wakayama, Kazuki Moyama, Tadahiro Ohmi | 2014-09-23 |
| 8716114 | Semiconductor device manufacturing method and semiconductor device | Tadahiro Ohmi, Tetsuya Goto, Takaaki Matsuoka | 2014-05-06 |
| 8664909 | Inverter unit, integrated circuit chip, and vehicle drive apparatus | Hitoshi Sumida, Ken Nonaka, Toshio Naka | 2014-03-04 |
| 8648393 | Transistor and semiconductor device | Tadahiro Ohmi, Rihito Kuroda | 2014-02-11 |
| 8643106 | Semiconductor device | Tadahiro Ohmi, Cheng Weitao | 2014-02-04 |
| 8633395 | Multilayer wiring board | Tadahiro Ohmi, Shigetoshi Sugawa, Hiroshi Imai | 2014-01-21 |
| 8575023 | Contact formation method, semiconductor device manufacturing method, and semiconductor device | Tadahiro Ohmi, Tatsunori ISOGAI, Hiroaki Tanaka | 2013-11-05 |
| 8497214 | Semiconductor device manufacturing method | Hirokazu Ueda, Toshihisa Nozawa, Takaaki Matsuoka, Tadahiro Ohmi | 2013-07-30 |
| 8492879 | Semiconductor substrate and semiconductor device | Tadahiro Ohmi, Tomoyuki Suwa, Rihito Kuroda, Hideo Kudo, Yoshinori Hayamizu | 2013-07-23 |
| 8465719 | Silicon carbide substrate, semiconductor device, wiring substrate, and silicon carbide manufacturing method | Tadahiro Ohmi, Sumio Sano, Fusao Fujita | 2013-06-18 |
| 8405343 | Inverter unit, integrated circuit chip, and vehicle drive apparatus | Hitoshi Sumida, Ken Nonaka, Toshio Naka | 2013-03-26 |
| 8399862 | Ion implanting apparatus and ion implanting method | Tadahiro Ohmi, Tetsuya Goto, Takaaki Matsuoka | 2013-03-19 |