Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553410 | Method of processing workpiece | Yasuhiko Saito | 2020-02-04 |
| 9765430 | Plasma processing apparatus and film formation method | Takehisa Saito, Koji Yamagishi, Hiroshi Kaneko | 2017-09-19 |
| 9543191 | Wiring structure having interlayer insulating film and wiring line without a barrier layer between | Takehisa Saito, Yugo Tomita, Hirokazu Matsumoto, Akihide Shirotori, Akinobu Teramoto +1 more | 2017-01-10 |
| 9165771 | Pulsed gas plasma doping method and apparatus | Peter L. G. Ventzek, Hirokazu Ueda, Yuuki Kobayashi, Masahiro Horigome | 2015-10-20 |
| 6992011 | Method and apparatus for removing material from chamber and wafer surfaces by high temperature hydrogen-containing plasma | Emmanuel Guidotti, Gert Leusink | 2006-01-31 |
| 5565380 | Semiconductor device and process for production thereof | Takeshi Nogami, Naoki Matsukawa | 1996-10-15 |