Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075057 | Device for treating an object with plasma | Gilles Baujon, Yannick Pilloux, Patrick Rabinzohn, Julien Richard, Marc Segers +1 more | 2021-07-27 |
| 7708835 | Film precursor tray for use in a film precursor evaporation system and method of using | Kenji Suzuki, Gerrit J. Leusink, Masamichi Hara, Daisuke Kuroiwa, Tadahiro Ishizaka | 2010-05-04 |
| 7678421 | Method for increasing deposition rates of metal layers from metal-carbonyl precursors | Kenji Suzuki, Gerrit J. Leusink, Fenton R. McFeely, Sandra G. Malhotra | 2010-03-16 |
| 7638002 | Multi-tray film precursor evaporation system and thin film deposition system incorporating same | Kenji Suzuki, Gerrit J. Leusink, Masamichi Hara, Daisuke Kuroiwa | 2009-12-29 |
| 7488512 | Method for preparing solid precursor tray for use in solid precursor evaporation system | Kenji Suzuki, Gerrit J. Leusink, Masamichi Hara, Daisuke Kuroiwa, Sandra G. Malhotra +2 more | 2009-02-10 |
| 7484315 | Replaceable precursor tray for use in a multi-tray solid precursor delivery system | Kenji Suzuki, Gerrit J. Leusink, Masamichi Hara, Daisuke Kuroiwa | 2009-02-03 |
| 7459396 | Method for thin film deposition using multi-tray film precursor evaporation system | Kenji Suzuki, Gerrit J. Leusink, Masamichi Hara, Daisuke Kuroiwa | 2008-12-02 |
| 7270848 | Method for increasing deposition rates of metal layers from metal-carbonyl precursors | Kenji Suzuki, Gerrit J. Leusink, Fenton R. McFeely, Sandra G. Malhotra | 2007-09-18 |
| 6992011 | Method and apparatus for removing material from chamber and wafer surfaces by high temperature hydrogen-containing plasma | Takenao Nemoto, Gert Leusink | 2006-01-31 |
| 6121140 | Method of improving surface morphology and reducing resistivity of chemical vapor deposition-metal films | Chantal Arena, Ronald Thomas Bertram, JR., Joseph T. Hillman | 2000-09-19 |
| 6090705 | Method of eliminating edge effect in chemical vapor deposition of a metal | Chantal Arena, Ronald Thomas Bertram, JR., Joseph T. Hillman | 2000-07-18 |