Issued Patents All Time
Showing 1–25 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416075 | Film-forming method and film-forming system | Masato Araki, Kohichi Satoh | 2025-09-16 |
| 12404582 | Method and apparatus for embedding ruthenium in recess formed on substrate surface | Mikio Suzuki, Toshio Hasegawa | 2025-09-02 |
| 12227841 | Ruthenium film forming method and substrate processing system | — | 2025-02-18 |
| 12060635 | Hard mask, substrate processing method, and substrate processing apparatus | Tsuyoshi Moriya, Yoshinori Morisada | 2024-08-13 |
| 11993841 | Substrate processing method and substrate processing apparatus | Masato Araki, Kohichi Satoh, Takashi Sakuma | 2024-05-28 |
| 11981992 | Method for forming RuSi film and substrate processing system | Naotaka Noro | 2024-05-14 |
| 11702734 | Method for forming ruthenium film and apparatus for forming ruthenium film | Shunji YAMAKAWA, Kohichi Satoh, Masato Araki | 2023-07-18 |
| 11680320 | Ruthenium film forming method and substrate processing system | — | 2023-06-20 |
| 11387112 | Surface processing method and processing system | Koichi Takatsuki, Mikio Suzuki, Toshio Hasegawa | 2022-07-12 |
| 11152260 | Embedding method and processing system | — | 2021-10-19 |
| 10927453 | TiN-based film and TiN-based film forming method | Masaki Koizumi, Masaki Sano, Seokhyoung HONG | 2021-02-23 |
| 10847379 | Etching method and etching apparatus | Masato Sakamoto, Takeshi ITATANI | 2020-11-24 |
| 10629433 | Method of manufacturing ruthenium wiring | — | 2020-04-21 |
| 10522467 | Ruthenium wiring and manufacturing method thereof | Toshiaki Fujisato, Cheonsoo Han | 2019-12-31 |
| 10490443 | Selective film forming method and method of manufacturing semiconductor device | Yumiko Kawano, Shuji AZUMO, Hiroki Murakami, Michitaka Aita, Koji Akiyama +2 more | 2019-11-26 |
| 10483100 | Method for forming TiON film | Masaki Koizumi, Masaki Sano, Seokhyoung HONG | 2019-11-19 |
| 10460988 | Removal method and processing method | Takeshi ITATANI, Kandabara Tapily, Kai-Hung Yu, Wanjae Park | 2019-10-29 |
| 10199451 | Lower electrode of DRAM capacitor and manufacturing method thereof | Masaki Koizumi, Masaki Sano, Seokhyoung HONG | 2019-02-05 |
| 10096548 | Method of manufacturing Cu wiring | Kenji Matsumoto, Peng Chang, Osamu Yokoyama, Takashi Sakuma, Hiroyuki Nagai | 2018-10-09 |
| 10056328 | Ruthenium metal feature fill for interconnects | Kai-Hung Yu, Gerrit J. Leusink, Cory Wajda, Takahiro Hakamata | 2018-08-21 |
| 9932669 | Metal nanodot formation method, metal nanodot formation apparatus and semiconductor device manufacturing method | — | 2018-04-03 |
| 9779950 | Ruthenium film forming method, film forming apparatus, and semiconductor device manufacturing method | — | 2017-10-03 |
| 9711449 | Ruthenium metal feature fill for interconnects | Kai-Hung Yu, Gerrit J. Leusink, Cory Wajda, Takahiro Hakamata | 2017-07-18 |
| 9607888 | Integration of ALD barrier layer and CVD Ru liner for void-free Cu filling | Kai-Hung Yu, Toshio Hasegawa, Manabu Oie, Fumitaka Amano, Steven P. Consiglio +3 more | 2017-03-28 |
| 9576850 | Method for manufacturing semiconductor device | Atsushi Gomi, Kenji Suzuki, Tatsuo Hatano, Yasushi Mizusawa | 2017-02-21 |