Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10927453 | TiN-based film and TiN-based film forming method | Tadahiro Ishizaka, Masaki Sano, Seokhyoung HONG | 2021-02-23 |
| 10529598 | Microwave heat treatment apparatus and microwave heat treatment method | Seokhyoung HONG, Taichi MONDEN, Yoshihiro Miyagawa | 2020-01-07 |
| 10483100 | Method for forming TiON film | Tadahiro Ishizaka, Masaki Sano, Seokhyoung HONG | 2019-11-19 |
| 10199451 | Lower electrode of DRAM capacitor and manufacturing method thereof | Tadahiro Ishizaka, Masaki Sano, Seokhyoung HONG | 2019-02-05 |
| 8021717 | Film formation method, cleaning method and film formation apparatus | Seishi Murakami, Hiroaki Ashizawa, Masato Koizumi | 2011-09-20 |