Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119219 | Film forming method, method for manufacturing semiconductor device, film forming device, and system for manufacturing semiconductor device | Hideo Nakamura, Yosuke Serizawa, Yoshikazu Ideno | 2024-10-15 |
| 12112924 | Composite structure and semiconductor manufacturing apparatus including composite structure | Ryoto TAKIZAWA | 2024-10-08 |
| 11802085 | Composite structure and semiconductor manufacturing apparatus including composite structure | Ryoto TAKIZAWA | 2023-10-31 |
| 11389907 | Laser machining apparatus and laser machining method | Koji Funaoka, Masayuki Saiki, Takayuki Hirano | 2022-07-19 |
| 11348794 | Semiconductor film forming method using hydrazine-based compound gas | Hideo Nakamura, Yosuke Serizawa, Yoshikazu Ideno, Takaya Shimizu, Seishi Murakami | 2022-05-31 |
| 10864548 | Film forming method and film forming apparatus | Yasushi Fujii, Tsuyoshi Takahashi, Seokhyoung HONG, Kazuyoshi Yamazaki, Hideo Nakamura +2 more | 2020-12-15 |
| 10759710 | Composite structure, semiconductor manufacturing apparatus and display manufacturing apparatus provided with composite structure | Junichi Iwasawa, Takuma Wada, Ryoto TAKIZAWA, Toshihiro Aoshima, Yuuki Takahashi +1 more | 2020-09-01 |
| 10618847 | Structure | Masakatsu Kiyohara | 2020-04-14 |
| 10340176 | Substrate mounting method and substrate mounting device | Toshiaki Fujisato, Taichi MONDEN, Yasushi Fujii, Yu Nunoshige | 2019-07-02 |
| 10087109 | Structure | Masakatsu Kiyohara | 2018-10-02 |
| 10081576 | Structure | Masakatsu Kiyohara | 2018-09-25 |
| 9963784 | Film forming method and film forming apparatus | Misuzu SATO | 2018-05-08 |
| 9331139 | Ruthenium film formation method and storage medium | Takaaki Iwai | 2016-05-03 |
| 8278594 | Method and apparatus for perforating printed circuit board | Kunio Arai, Hiroyuki Sugawara, Hiromi Nishiyawa | 2012-10-02 |
| 8021717 | Film formation method, cleaning method and film formation apparatus | Seishi Murakami, Masaki Koizumi, Masato Koizumi | 2011-09-20 |
| 7897268 | Composite structure | Junichi Iwasawa, Ryoichi Nishimizu, Hironori Hatono | 2011-03-01 |
| 7531767 | Method and apparatus for laser perforating printed circuit board | Kunio Arai, Hiroyuki Sugawara, Hiromi Nishiyawa | 2009-05-12 |
| 7205501 | Laser machining method and laser machining apparatus | Kunio Arai, Kazuhisa Ishii | 2007-04-17 |
| 6407010 | Single-substrate-heat-processing apparatus and method for semiconductor process | Akinobu Kakimoto | 2002-06-18 |