Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11965242 | Raw material supply apparatus and raw material supply method | Tsuneyuki Okabe, Eiichi KOMORI | 2024-04-23 |
| 11348794 | Semiconductor film forming method using hydrazine-based compound gas | Hideo Nakamura, Yosuke Serizawa, Yoshikazu Ideno, Hiroaki Ashizawa, Takaya Shimizu | 2022-05-31 |
| 10950417 | Substrate processing apparatus and substrate loading mechanism | Einosuke Tsuda, Takayuki Kamaishi | 2021-03-16 |
| 10546753 | Method of removing silicon oxide film | Hideaki Yamasaki, Takamichi Kikuchi | 2020-01-28 |
| 10221478 | Film formation device | Kensaku Narushima, Daisuke Toriya, Kentaro Asakura | 2019-03-05 |
| 9984892 | Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system | Takashi Kobayashi, Takashi Sakuma, Masahiko Tomita, Takamichi Kikuchi, Akitaka Shimizu +2 more | 2018-05-29 |
| 9620370 | Method of forming Ti film | Takaya Shimizu, Satoshi Wakabayashi | 2017-04-11 |
| 9349642 | Method of forming contact layer | Takaya Shimizu, Satoshi Wakabayashi | 2016-05-24 |
| 8106335 | Processing apparatus and heater unit | Kunihiro Tada | 2012-01-31 |
| 8021717 | Film formation method, cleaning method and film formation apparatus | Masaki Koizumi, Hiroaki Ashizawa, Masato Koizumi | 2011-09-20 |
| 7351291 | Semiconductor processing system | — | 2008-04-01 |
| 6169032 | CVD film formation method | Tatsuo Hatano | 2001-01-02 |
| 6153515 | Method of forming multilayered film | Tatsuo Hatano | 2000-11-28 |
| RE36925 | Vacuum treatment apparatus and a method for manufacturing semiconductor device therein | Takayuki Ohba, Toshiya Suzuki | 2000-10-31 |
| 6126994 | Liquid material supply apparatus and method | Tatsuo Hatano | 2000-10-03 |
| 5963834 | Method for forming a CVD film | Tatsuo Hatano, Keishi Akiba, Takaya Shimizu | 1999-10-05 |
| 5880526 | Barrier metal layer | Tatsuo Hatano | 1999-03-09 |
| 5733521 | Process for producing a purified aqueous hydrogen peroxide solution | Yoshitsugu Minamikawa, Masamichi Hattori | 1998-03-31 |
| 5709757 | Film forming and dry cleaning apparatus and method | Tatsuo Hatano, Kunihiro Tada | 1998-01-20 |
| 5704214 | Apparatus for removing tramp materials and method therefor | Yuichiro Fujikawa, Tatsuo Hatano | 1998-01-06 |
| 5690743 | Liquid material supply apparatus and method | Tatsuo Hatano | 1997-11-25 |
| 5595606 | Shower head and film forming apparatus using the same | Yuichiro Fujikawa, Tatsuo Hatano | 1997-01-21 |
| 5522412 | Vacuum treatment apparatus and a cleaning method therefor | Takayuki Ohba, Toshiya Suzuki | 1996-06-04 |
| 5462603 | Semiconductor processing apparatus | — | 1995-10-31 |
| 5456898 | Method for enrichment and purification of aqueous hydrogen peroxide solution | Shigeki Shimokawa, Yoshitsugu Minamikawa | 1995-10-10 |