Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950417 | Substrate processing apparatus and substrate loading mechanism | Einosuke Tsuda, Seishi Murakami | 2021-03-16 |
| 9984892 | Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system | Takashi Kobayashi, Seishi Murakami, Takashi Sakuma, Masahiko Tomita, Takamichi Kikuchi +2 more | 2018-05-29 |
| 8191505 | Process gas introducing mechanism and plasma processing device | Akinori Shimamura, Masato Morishima | 2012-06-05 |
| 7769279 | Heat treatment apparatus | Sumi Tanaka, Kouki Suzuki | 2010-08-03 |
| 7250094 | Heat treatment apparatus | Sumi Tanaka, Kouki Suzuki | 2007-07-31 |