Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094753 | Stage device and substrate processing apparatus | Melvin Verbaas, Kentaro Asakura | 2024-09-17 |
| 11393696 | Method of controlling substrate treatment apparatus, substrate treatment apparatus, and cluster system | — | 2022-07-19 |
| 11281116 | Substrate stage and substrate processing apparatus | Daisuke Toriya, Satoshi Yonekura, Satoshi Takeda, Motoshi FUKUDOME, Kyoko Ikeda | 2022-03-22 |
| 11193205 | Source material container | Yuichi FURUYA, Hiroyuki Mori, Eiichi KOMORI, Tomohisa KIMOTO | 2021-12-07 |
| 10950417 | Substrate processing apparatus and substrate loading mechanism | Seishi Murakami, Takayuki Kamaishi | 2021-03-16 |
| 9984892 | Oxide film removing method, oxide film removing apparatus, contact forming method, and contact forming system | Takashi Kobayashi, Seishi Murakami, Takashi Sakuma, Masahiko Tomita, Takamichi Kikuchi +2 more | 2018-05-29 |
| 8945306 | Gas supply device | — | 2015-02-03 |
| 8147786 | Gas exhaust system of film-forming apparatus, film-forming apparatus, and method for processing exhaust gas | — | 2012-04-03 |