Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400841 | Trap device and semiconductor manufacturing device | Hiroki Sakabe | 2025-08-26 |
| 12392033 | Substrate processing apparatus and substrate processing method | Masamichi Hara | 2025-08-19 |
| 12344930 | Deposition method and deposition apparatus | Kohichi Satoh, Masato Araki | 2025-07-01 |
| 11796460 | Absorbance analysis apparatus for DCR gas, absorbance analysis method for DCR gas, and absorbance analysis program recording medium on which program for DCR gas is recorded | Masayuki Tanaka, Yuhei SAKAGUCHI, Masakazu Minami, Toru Shimizu | 2023-10-24 |
| 11753720 | Film forming apparatus, source supply apparatus, and film forming method | Masayuki Tanaka | 2023-09-12 |
| 11466365 | Film-forming apparatus | Daisuke Toriya, Toshiaki Fujisato | 2022-10-11 |
| 11441224 | Method of controlling substrate processing apparatus, and substrate processing apparatus | Daisuke Toriya, Toshiaki Fujisato | 2022-09-13 |
| 11306847 | Valve device, processing apparatus, and control method | Tomohisa KIMOTO, Takashi Kakegawa, Eiichi KOMORI, Hideaki Fujita, Hiroyuki Mori | 2022-04-19 |
| 11193205 | Source material container | Hiroyuki Mori, Einosuke Tsuda, Eiichi KOMORI, Tomohisa KIMOTO | 2021-12-07 |
| 10156014 | Gas treatment apparatus and gas treatment method | Takashi Kakegawa, Daisuke Toriya | 2018-12-18 |