Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11873556 | Raw material supply apparatus and film forming apparatus | Noriyuki Watanabe, Kensaku Narushima, Kouichi SEKIDO, Takuya KAWAGUCHI | 2024-01-16 |
| 11506321 | Pipe heating device and substrate processing apparatus | Eiichi KOMORI | 2022-11-22 |
| 11306847 | Valve device, processing apparatus, and control method | Yuichi FURUYA, Takashi Kakegawa, Eiichi KOMORI, Hideaki Fujita, Hiroyuki Mori | 2022-04-19 |
| 11193205 | Source material container | Yuichi FURUYA, Hiroyuki Mori, Einosuke Tsuda, Eiichi KOMORI | 2021-12-07 |