Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984319 | Substrate processing method and film forming system | Nagayasu Hiramatsu, Takanobu HOTTA, Atsushi Matsumoto, Masato Araki, Hideaki Yamasaki | 2024-05-14 |
| 11873556 | Raw material supply apparatus and film forming apparatus | Tomohisa KIMOTO, Noriyuki Watanabe, Kouichi SEKIDO, Takuya KAWAGUCHI | 2024-01-16 |
| 11753719 | Flow rate control method, flow rate control device, and film forming apparatus | Kennan Mo, Kouichi SEKIDO, Takanobu HOTTA, Nagayasu Hiramatsu, Atsushi Matsumoto | 2023-09-12 |
| 11629404 | Method of forming tungsten film and controller | Nagayasu Hiramatsu, Atsushi Matsumoto, Takanobu HOTTA | 2023-04-18 |
| 11155923 | Gas supply device, gas supply method and film forming method | Katsumasa Yamaguchi, Hironori Yagi | 2021-10-26 |
| 10910225 | Film forming method | Atsushi Matsumoto, Nagayasu Hiramatsu, Takanobu HOTTA | 2021-02-02 |
| 10870919 | Gas supply method and film forming method | Katsumasa Yamaguchi, Hironori Yagi, Kouichi SEKIDO | 2020-12-22 |
| 10872814 | Film forming method and film forming apparatus | Takanobu HOTTA, Atsushi Matsumoto | 2020-12-22 |
| 10829854 | Film forming method | Katsumasa Yamaguchi | 2020-11-10 |
| 10316410 | Method of filling recesses in substrate with tungsten | Katsumasa Yamaguchi | 2019-06-11 |
| 10256101 | Raw material gas supply apparatus, raw material gas supply method and storage medium | Hironori Yagi, Atsunari Matsuyama | 2019-04-09 |
| 10221478 | Film formation device | Daisuke Toriya, Kentaro Asakura, Seishi Murakami | 2019-03-05 |
| 9646848 | Etching method, etching apparatus and storage medium | Satoshi TODA, Hiroyuki Takahashi | 2017-05-09 |
| 9536745 | Tungsten film forming method | Takanobu HOTTA, Tomohisa Maruyama, Yasushi Aiba | 2017-01-03 |
| 9390933 | Etching method, storage medium and etching apparatus | Kohichi Satoh, Motoko NAKAGOMI, Eiichi KOMORI, Taiki Katou | 2016-07-12 |
| 8334208 | Film-forming method and film-forming apparatus | — | 2012-12-18 |
| 8263181 | Ti-based film forming method and storage medium | Satoshi Wakabayashi, Takamitsu TAKAYAMA | 2012-09-11 |
| 8257790 | Ti-containing film formation method and storage medium | Satoshi Wakabayashi, Kunihiro Tada | 2012-09-04 |
| 7981794 | Film forming method and substrate processing apparatus | Fumitaka Amano, Satoshi Wakabayashi | 2011-07-19 |
| 7906442 | Gas treatment method and computer readable storage medium | Satoshi Wakabayashi | 2011-03-15 |
| 7737005 | Method for forming Ti film and TiN film, contact structure, computer readable storing medium and computer program | Kunihiro Tada, Satoshi Wakabayashi | 2010-06-15 |