Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227843 | Film forming method and tungsten film | Takuya KAWAGUCHI, Hideaki Yamasaki | 2025-02-18 |
| 12221693 | Stress reducing method | Takuya KAWAGUCHI, Hideaki Yamasaki | 2025-02-11 |
| 12188125 | Showerhead and substrate processing apparatus | Takuya KAWAGUCHI, Hideaki Yamasaki, Toshio Takagi, Takashi Kakegawa | 2025-01-07 |
| 11984319 | Substrate processing method and film forming system | Kensaku Narushima, Nagayasu Hiramatsu, Atsushi Matsumoto, Masato Araki, Hideaki Yamasaki | 2024-05-14 |
| 11753719 | Flow rate control method, flow rate control device, and film forming apparatus | Kennan Mo, Kouichi SEKIDO, Nagayasu Hiramatsu, Atsushi Matsumoto, Kensaku Narushima | 2023-09-12 |
| 11629404 | Method of forming tungsten film and controller | Kensaku Narushima, Nagayasu Hiramatsu, Atsushi Matsumoto | 2023-04-18 |
| 10910225 | Film forming method | Kensaku Narushima, Atsushi Matsumoto, Nagayasu Hiramatsu | 2021-02-02 |
| 10872814 | Film forming method and film forming apparatus | Kensaku Narushima, Atsushi Matsumoto | 2020-12-22 |
| 10400330 | Tungsten film forming method and storage medium | Kenji Suzuki, Tomohisa Maruyama, Masayuki Nasu, Junya Miyahara, Koji Maekawa | 2019-09-03 |
| 10131986 | Method of forming metal film | Kenji Suzuki, Koji Maekawa, Yasushi Aiba | 2018-11-20 |
| 10026616 | Method of reducing stress in metal film and metal film forming method | Kenji Suzuki, Koji Maekawa, Yasushi Aiba | 2018-07-17 |
| 9938620 | Gas supply mechanism, gas supplying method, film forming apparatus and film forming method using the same | Masayuki Moroi, Hajime Yamanaka, Yasushi Aiba | 2018-04-10 |
| 9640404 | Method of forming tungsten film | Kenji Suzuki, Koji Maekawa | 2017-05-02 |
| 9536782 | Tungsten film forming method, semiconductor device manufacturing method, and storage medium | Yasushi Aiba, Koji Maekawa | 2017-01-03 |
| 9536745 | Tungsten film forming method | Kensaku Narushima, Tomohisa Maruyama, Yasushi Aiba | 2017-01-03 |
| 9472454 | Tungsten film forming method | Yasushi Aiba | 2016-10-18 |