Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10400330 | Tungsten film forming method and storage medium | Kenji Suzuki, Takanobu HOTTA, Tomohisa Maruyama, Masayuki Nasu, Koji Maekawa | 2019-09-03 |
| 10153169 | Method of controlling threshold of transistor and method of manufacturing semiconductor device | Kentaro Shiraga, Koji Akiyama, Yutaka Fujino | 2018-12-11 |
| 9887081 | Method for manufacturing insulating film laminated structure | Yutaka Fujino, Genji Nakamura, Kentaro Shiraga | 2018-02-06 |
| 8119545 | Forming a silicon nitride film by plasma CVD | Minoru Honda, Toshio Nakanishi, Masayuki Kohno, Tatsuo Nishita | 2012-02-21 |