Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351905 | Film forming method and film forming apparatus | Ryota IFUKU, Makoto Wada, Nobutake KABUKI, Takashi Matsumoto, Hiroshi Terada | 2025-07-08 |
| 11869927 | Method of manufacturing semiconductor device | Yumiko Kawano, Philippe Gaubert, Hajime NAKABAYASHI | 2024-01-09 |
| 11737276 | Method of manufacturing semiconductor device and semiconductor device | Sara OTSUKI, Muneyuki OTANI, Kazuya Takahashi | 2023-08-22 |
| 10361366 | Resistive random accress memory containing a conformal titanium aluminum carbide film and method of making | Takahiro Hakamata, Sara Aoki, Toshio Hasegawa, Takamichi Kikuchi | 2019-07-23 |
| 9893161 | Parasitic capacitance reduction structure for nanowire transistors and method of manufacturing | Kandabara Tapily | 2018-02-13 |
| 9887081 | Method for manufacturing insulating film laminated structure | Junya Miyahara, Yutaka Fujino, Kentaro Shiraga | 2018-02-06 |
| 9882026 | Method for forming a nanowire structure | Kandabara Tapily | 2018-01-30 |
| 9698020 | CMOS Vt control integration by modification of metal-containing gate electrodes | Toshio Hasegawa | 2017-07-04 |
| 8846474 | Dual workfunction semiconductor devices and methods for forming thereof | Toshio Hasegawa | 2014-09-30 |
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki +4 more | 2011-09-20 |
| 7897498 | Method for manufacturing semiconductor device | Glenn W. Gale, Yoshihiro Hirota, Yusuke Muraki, Masato Kushibiki, Naoki Shindo +3 more | 2011-03-01 |
| 7892914 | Semiconductor device and manufacturing method thereof | Yasushi Akasaka | 2011-02-22 |
| 7674710 | Method of integrating metal-containing films into semiconductor devices | Shigeo Ashigaki, Hideaki Yamasaki, Tomoyuki Sakoda, Mikio Suzuki, Gert Leusink | 2010-03-09 |
| 7662236 | Method for forming insulation film | Takuya Sugawara, Yoshihide Tada, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki +1 more | 2010-02-16 |
| 7655574 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki +4 more | 2010-02-02 |
| 7622402 | Method for forming underlying insulation film | Takuya Sugawara, Yoshihide Tada, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasaki +4 more | 2009-11-24 |
| 7622340 | Method for manufacturing semiconductor device | Yasushi Akasaka | 2009-11-24 |
| 7446052 | Method for forming insulation film | Takuya Sugawara, Yoshihide Tada, Shigenori Ozaki, Toshio Nakanishi, Masaru Sasakii +1 more | 2008-11-04 |
| 7084023 | Method of manufacturing semiconductor device, film-forming apparatus, and storage medium | Shigeru Nakajima, Dong-Kyun Choi, Tomonori Fujiwara, Hiroaki Ikegawa | 2006-08-01 |
| 6933249 | Method of fabricating semiconductor device | Shin Yokoyama, Anri Nakajima, Yoshihide Tada, Masayuki Imai, Tsukasa Yonekawa | 2005-08-23 |
| 6821566 | Method and apparatus for forming insulating film containing silicon oxy-nitride | Yoshihide Tada, Masayuki Imai, Asami Suemura, Shingo Hishiya | 2004-11-23 |