Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11737276 | Method of manufacturing semiconductor device and semiconductor device | Sara OTSUKI, Genji Nakamura, Kazuya Takahashi | 2023-08-22 |
| 9551068 | Film forming method and film forming apparatus | Takeshi Kumagai, Kazuya Okubo | 2017-01-24 |
| 9441291 | Method of depositing a film | Takeshi Kumagai | 2016-09-13 |
| 8895456 | Method of depositing a film | Mitsuhiro Tachibana, Hiroaki Ikegawa, Yu Wamura, Jun Ogawa, Kosuke Takahashi | 2014-11-25 |