Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283489 | Etching method and etching apparatus | Satoshi TODA, Naoki Shindo, Haruna Suzuki, Gen You | 2025-04-22 |
| 12237173 | Substrate processing method, substrate processing apparatus and substrate processing system | Keiko Hada, Akitaka Shimizu, Koichi Nagakura | 2025-02-25 |
| 10903083 | Substrate processing method, substrate processing apparatus and substrate processing system | Keiko Hada, Akitaka Shimizu, Koichi Nagakura | 2021-01-26 |
| 10460946 | Naturally oxidized film removing method and naturally oxidized film removing device | Jun LIN, Koji Takeya, Shinichi Kawaguchi, Akifumi Yao, Kunihiro Yamauchi | 2019-10-29 |
| 9991138 | Etching method and etching apparatus | Jun LIN, Koji Takeya, Akifumi Yao, Kunihiro Yamauchi, Tatsuo Miyazaki | 2018-06-05 |
| 9583312 | Film formation device, substrate processing device, and film formation method | Jun Yamawaku, Chishio Koshimizu, Yohei Yamazawa, Hitoshi Kato, Takeshi Kobayashi +2 more | 2017-02-28 |
| 9136156 | Substrate processing apparatus and film deposition apparatus | Tadashi Enomoto, Haruhiko Furuya, Kentaro Oshimo | 2015-09-15 |
| 9111747 | Film deposition apparatus, substrate processing apparatus and film deposition method | Jun Yamawaku, Chishio Koshimizu, Hitoshi Kato, Takeshi Kobayashi, Shigehiro Miura +1 more | 2015-08-18 |
| 8895456 | Method of depositing a film | Hiroaki Ikegawa, Yu Wamura, Muneyuki OTANI, Jun Ogawa, Kosuke Takahashi | 2014-11-25 |
| 7592256 | Method of forming tungsten film | Kazuya Okubo, Cheng Chia Fang, Kohichi Sato, Hotaka Ishizuka | 2009-09-22 |
| 7135331 | Apparatus for detecting biopolymers and cartridge | Keiichi Sato, Toshiki Morita, Motonao Nakao | 2006-11-14 |
| 7063871 | CVD process capable of reducing incubation time | Hideaki Yamasaki, Tatsuo Hatano, Tsukasa Matsuda, Taro Ikeda, Kazuhito Nakamura +2 more | 2006-06-20 |
| 6924223 | Method of forming a metal layer using an intermittent precursor gas flow process | Hideaki Yamasaki, Tsukasa Matsuda, Atsushi Gomi, Tatsuo Hatano, Koumei Matsuzava +6 more | 2005-08-02 |
| 6913996 | Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring | Hideaki Yamasaki, Kazuya Okubo, Kenji Suzuki, Yumiko Kawano | 2005-07-05 |
| 6875603 | Apparatus for detecting biopolymers and cartridge | Keiichi Sato, Toshiki Morita, Motonao Nakao | 2005-04-05 |
| 6835352 | Spotting pin | Seiichiro Ito | 2004-12-28 |
| 6790651 | Hybridization reaction apparatus and hybridization method | Toshiaki Tanaka, Shigeru Kijima | 2004-09-14 |
| 6787349 | Biochip reader and labeling reagent | Kenji Yamamoto, Katsuya Mizuno | 2004-09-07 |
| 6767748 | Spotting pin, spotting device and method for spotting biomolecules | Naoki Yokokawa, Hiroshi Kishida | 2004-07-27 |
| 6737666 | Apparatus and method for detecting an end point of a cleaning process | Natsuko Ito, Tsuyoshi Moriya, Fumihiko Uesugi, Yoshinori Kato, Masaru Aomori +1 more | 2004-05-18 |
| 6726883 | Spotting pin | Seiichiro Ito, Naoki Yokokawa | 2004-04-27 |
| 6660101 | Method and apparatus for cleaning film deposition device | — | 2003-12-09 |
| 6646271 | Method and apparatus for reading fluorescence | Naoki Yokokawa | 2003-11-11 |
| 6582954 | Biopolymer detector | Keiichi Sato, Toshiki Morita, Motonao Nakao | 2003-06-24 |
| 6465347 | Tungsten film forming method | Hotaka Ishizuka | 2002-10-15 |