Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417922 | Surface treatment method, dry etching method, cleaning method, semiconductor device manufacturing method, and etching device | Hikaru KITAYAMA, Akiou Kikuchi | 2025-09-16 |
| 12308244 | Dry etching method, method for producing semiconductor device, and etching device | Hikaru KITAYAMA, Akifumi Yao | 2025-05-20 |
| 11618954 | Dry etching method, method for manufacturing semiconductor device, and etching device | Yuuta Takeda, Akifumi Yao | 2023-04-04 |
| 11335573 | Dry etching method and β-diketone-filled container | Takashi Masuda, Akifumi Yao | 2022-05-17 |
| 11282714 | Etching method and etching device | Akifumi Yao, Tatsuo Miyazaki, Jun LIN, Susumu YAMAUCHI, Kazuaki Nishimura | 2022-03-22 |
| 10957554 | Etching method and etching device | Takashi Masuda, Akifumi Yao | 2021-03-23 |
| 10460946 | Naturally oxidized film removing method and naturally oxidized film removing device | Jun LIN, Koji Takeya, Shinichi Kawaguchi, Mitsuhiro Tachibana, Akifumi Yao | 2019-10-29 |
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Kenji Kameda, Masaya NAGATO, Akiou Kikuchi, Yuta Takeda | 2018-12-18 |
| 9991138 | Etching method and etching apparatus | Jun LIN, Koji Takeya, Mitsuhiro Tachibana, Akifumi Yao, Tatsuo Miyazaki | 2018-06-05 |
| 6568797 | Ink jet head | Shinichi Nishi, Yoshikazu Maekawa | 2003-05-27 |
| 6560833 | Method of manufacturing ink jet head | Shinichi Nishi, Katsuaki Komatsu, Takao Yamaguchi, Yoshio Takeuchi, Kunio Ito +3 more | 2003-05-13 |
| 4456372 | Copying machine equipped with a document detecting member | — | 1984-06-26 |