Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12145857 | Method for producing tungsten hexafluoride | Akiou Kikuchi, Masakiyo NAGATOMO, Akifumi Yao | 2024-11-19 |
| 10926211 | Method for purifying fluorine compound gas | Akifumi Yao, Kohei Ooya, Jun Eto | 2021-02-23 |
| 10754944 | Processing system, and processing method and program | — | 2020-08-25 |
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Kenji Kameda, Masaya NAGATO, Akiou Kikuchi, Kunihiro Yamauchi | 2018-12-18 |
| 8562751 | Dry cleaning method of substrate processing apparatus | Isao Gunji, Yusaku Izawa, Hitoshi Itoh, Tomonori Umezaki, Isamu Mori | 2013-10-22 |
| 8213274 | Optical disc reproducing method | — | 2012-07-03 |