Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu, Shinya Ebata +5 more | 2024-08-06 |
| 11735412 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Yushin Takasawa | 2023-08-22 |
| 11705326 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Hiroshi Ashihara, Motomu DEGAI | 2023-07-18 |
| 11616334 | Method of manufacturing cable assembly, horn chip used in the method and cable assembly manufactured by the method | Masayuki Shiratori | 2023-03-28 |
| 11515152 | Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrate | Shintaro Kogura, Kazuhiro Harada, Shogo Otani, Koichi Honda, Mamoru Umemoto +3 more | 2022-11-29 |
| 11398686 | Wire, wire with terminal, harness, manufacturing method for wire, and manufacturing method for wire with terminal | Kazuomi Sato, Kenji Yamazaki, Hayato Nakamura, Takaichi Teramoto | 2022-07-26 |
| 11094532 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Kimihiko NAKATANI, Tatsuru Matsuoka, Satoshi Shimamoto | 2021-08-17 |
| 11001923 | Method of manufacturing semiconductor device and recording medium | Noriyuki Isobe, Koichi Oikawa | 2021-05-11 |
| 10998647 | Harness with a wire terminal | Kazuomi Sato, Kenji Yamazaki, Hayato Nakamura | 2021-05-04 |
| 10968517 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shin SONE, Masaya NAGATO, Kotaro Konno | 2021-04-06 |
| 10804100 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Atsushi Sano, Tatsuru Matsuoka | 2020-10-13 |
| 10724137 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and cleaning completion determining method | Osamu Morita, Shinichiro Mori | 2020-07-28 |
| 10176988 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Horiike | 2019-01-08 |
| 10156012 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Masaya NAGATO, Akiou Kikuchi, Yuta Takeda, Kunihiro Yamauchi | 2018-12-18 |
| 10153153 | Method for removing adhering matter and dry etching method | Akiou Kikuchi, Masanori Watari, Shin Hiyama, Yasutoshi TSUBOTA | 2018-12-11 |
| 9976214 | Cleaning method and method of manufacturing semiconductor device | Masaya NAGATO, Koei KURIBAYASHI | 2018-05-22 |
| 9856560 | Method for manufacturing semiconductor device and substrate processing apparatus | Jie Wang, Yuji Urano | 2018-01-02 |
| 9683288 | Method of manufacturing semiconductor device and method of cleaning processing vessel | Jun Sonobe, Yudai Tadaki | 2017-06-20 |
| 9587308 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yuji Urano | 2017-03-07 |
| 9540727 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Jun Sonobe, Yudai Tadaki | 2017-01-10 |
| 9028648 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tsukasa Kamakura | 2015-05-12 |
| 8895457 | Method of manufacturing semiconductor device and substrate processing apparatus | Naonori Akae, Kotaro Murakami, Yoshiro Hirose | 2014-11-25 |
| 8741783 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yuji Urano | 2014-06-03 |
| 8679989 | Method of manufacturing semiconductor device including removal of deposits from process chamber and supply portion | Sadao Nakashima, Takahiro Maeda, Kiyohiko Maeda, Yushin Takasawa | 2014-03-25 |
| 8679259 | Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vessel | Jun Sonobe, Yudai Tadaki | 2014-03-25 |