Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515152 | Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrate | Shintaro Kogura, Kazuhiro Harada, Shogo Otani, Koichi Honda, Kazuhiro Shimoda +3 more | 2022-11-29 |
| 9963785 | Substrate processing apparatus and semiconductor device manufacturing method | Masayuki Asai, Koichi Honda, Kazuyuki Okuda | 2018-05-08 |
| 9593422 | Substrate processing apparatus and semiconductor device manufacturing method | Masayuki Asai, Koichi Honda, Kazuyuki Okuda | 2017-03-14 |
| 9175395 | Substrate processing apparatus and semiconductor device manufacturing method | Masayuki Asai, Koichi Honda, Kazuyuki Okuda | 2015-11-03 |