Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288683 | Method of manufacturing semiconductor device, substrate processing method, non-transitory computer-readable recording medium and substrate processing apparatus | Yasunobu Koshi, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2025-04-29 |
| 12266522 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Syuzo SAKURAI, Yasuhiro Inokuchi, Masayoshi Minami | 2025-04-01 |
| 12148611 | Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Tomoki IMAMURA, Masato Terasaki | 2024-11-19 |
| 12142476 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Yasuhiro Inokuchi, Norikazu Mizuno | 2024-11-12 |
| 11972934 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Takaaki Noda, Masato Terasaki | 2024-04-30 |
| 11915927 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Syuzo SAKURAI, Yasuhiro Inokuchi, Masayoshi Minami | 2024-02-27 |
| 11705325 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Yasuhiro Inokuchi, Norikazu Mizuno | 2023-07-18 |
| 11527401 | Method of processing substate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Yasuhiro Inokuchi, Norikazu Mizuno | 2022-12-13 |
| 11361961 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Syuzo SAKURAI, Yasuhiro Inokuchi, Masayoshi Minami | 2022-06-14 |
| 10640869 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayoshi Minami, Yoshinobu Nakamura, Kosuke Takagi, Yukinao KAGA, Yuji Takebayashi | 2020-05-05 |
| 9963785 | Substrate processing apparatus and semiconductor device manufacturing method | Masayuki Asai, Koichi Honda, Mamoru Umemoto | 2018-05-08 |
| 9895727 | Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording medium | Yoshinobu Nakamura, Masayoshi Minami, Masayuki Asai, Yuji Urano | 2018-02-20 |
| D791091 | Pattern wafer | Hiromi Okada, Shinya Morita, Satoshi Aizawa, Masayoshi Minami, Masayuki Yamada | 2017-07-04 |
| 9593422 | Substrate processing apparatus and semiconductor device manufacturing method | Masayuki Asai, Koichi Honda, Mamoru Umemoto | 2017-03-14 |
| 9349587 | Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus | Yoshiro Hirose, Atsushi Sano, Kiyohiko Maeda | 2016-05-24 |
| 9218955 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Sasajima, Yoshinobu Nakamura | 2015-12-22 |
| 9177786 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Atsushi Sano, Yoshiro Hirose, Kiyohiko Maeda, Ryuji Yamamoto | 2015-11-03 |
| 9175395 | Substrate processing apparatus and semiconductor device manufacturing method | Masayuki Asai, Koichi Honda, Mamoru Umemoto | 2015-11-03 |
| 9169553 | Semiconductor device producing method | Masanori Sakai, Nobuhito Shima | 2015-10-27 |
| 8956984 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and non-transitory computer-readable recording medium | — | 2015-02-17 |
| 8575042 | Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus | Yosuke Ota, Yoshiro Hirose, Atsushi Sano, Osamu Kasahara, Kiyohiko Maeda | 2013-11-05 |
| 8535479 | Manufacturing method of semiconductor device, and semiconductor device | Norikazu Mizuno, Kenji Kanayama, Yoshiro Hirose, Masayuki Asai | 2013-09-17 |
| 8366868 | Substrate processing apparatus | Toru Kagaya, Masanori Sakai | 2013-02-05 |
| 8261692 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima +5 more | 2012-09-11 |
| 8227346 | Method of producing semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai +2 more | 2012-07-24 |