Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266522 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Masayoshi Minami | 2025-04-01 |
| 12142476 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Kazuyuki Okuda, Norikazu Mizuno | 2024-11-12 |
| 11915927 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Masayoshi Minami | 2024-02-27 |
| 11705325 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Kazuyuki Okuda, Norikazu Mizuno | 2023-07-18 |
| 11527401 | Method of processing substate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Kazuyuki Okuda, Norikazu Mizuno | 2022-12-13 |
| 11361961 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Masayoshi Minami | 2022-06-14 |
| 9373499 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2016-06-21 |
| 9039912 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2015-05-26 |
| 8790463 | Substrate processing apparatus and semiconductor device producing method | Atsushi Moriya, Yasuo Kunii | 2014-07-29 |
| 8652258 | Substrate treatment device | Takashi Yokogawa, Katsuhiko Yamamoto, Yoshiaki Hashiba, Yasuhiro Ogawa | 2014-02-18 |
| 8544411 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2013-10-01 |
| 8466049 | Semiconductor device producing method with selective epitaxial growth | Atsushi Moriya, Katsuhiko Yamamoto, Yoshiaki Hashiba, Takashi Yokogawa | 2013-06-18 |
| 8070880 | Substrate processing apparatus | Tetsuya Marubayashi | 2011-12-06 |
| 8071477 | Method of manufacturing semiconductor device and substrate processing apparatus | Atsushi Moriya, Tetsuya Marubayashi | 2011-12-06 |
| 8028652 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-10-04 |
| 8025739 | Method of manufacturing semiconductor device | Kiyohisa ISHIBASHI, Atsushi Moriya, Yoshiaki Hashiba | 2011-09-27 |
| 8020514 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-09-20 |
| 8012885 | Manufacturing method of semiconductor device | Atsushi Moriya, Yasuhiro Ogawa | 2011-09-06 |
| 7861668 | Batch-type remote plasma processing apparatus | Kazuyuki Toyoda, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-01-04 |
| 7851379 | Substrate processing method and substrate processing apparatus | Atsushi Moriya, Yasuo Kunii | 2010-12-14 |
| 6949474 | Method of manufacturing a semiconductor device and a semiconductor manufacture system | Atsushi Moriya, Yasuo Kunii, Junichi Murota | 2005-09-27 |
| 6872636 | Method for fabricating a semiconductor device | Atsushi Moriya, Takaaki Noda, Yasuo Kunii | 2005-03-29 |
| 6764916 | Manufacturing method for semiconductor device | Ryoichi Furukawa, Tadanori Yoshida, Masayuki Tsuneda, Satoru Tagami | 2004-07-20 |
| 6503079 | Substrate processing apparatus and method for manufacturing semiconductor device | Minoru Kogano, Makoto Sambu, Atsushi Moriya, Yasuo Kunii | 2003-01-07 |
| 6462411 | Semiconductor wafer processing apparatus for transferring a wafer mount | Tomoji Watanabe, Nobuyuki Mise, Toshiyuki Uchino, Norio Suzuki, Yoshihiko Sakurai +3 more | 2002-10-08 |