Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11104995 | Substrate processing apparatus | Takashi Yahata, Satoshi Takano, Naofumi Ohashi, Tadashi Takasaki | 2021-08-31 |
| 10943806 | Substrate processing apparatus, method of manufacturing semiconductor device, and non- transitory computer-readable recording medium | Kazuhiro Yuasa, Tetsuo Yamamoto | 2021-03-09 |
| 10818476 | Substrate processing apparatus | Naofumi Ohashi | 2020-10-27 |
| 10224227 | Method of processing substrate | Naofumi Ohashi, Satoshi Takano, Shun MATSUI | 2019-03-05 |
| 10115583 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Hiroshi Ashihara, Naofumi Ohashi | 2018-10-30 |
| 10032630 | Method of manufacturing semiconductor device | Katsuhiko Yamamoto, Hajime Karasawa | 2018-07-24 |
| 9991179 | Method of manufacturing semiconductor device | Naofumi Ohashi, Satoshi Shimamoto, Toshiyuki Kikuchi | 2018-06-05 |
| 9818630 | Substrate processing apparatus | Akira Takahashi | 2017-11-14 |
| 9735068 | Method of manufacturing semiconductor device | Naofumi Ohashi, Masanori NAKAYAMA, Atsuhiko Suda, Shun MATSUI | 2017-08-15 |
| 9666494 | Method of manufacturing semiconductor device | Atsuhiko Suda, Toshiyuki Kikuchi | 2017-05-30 |
| 9508546 | Method of manufacturing semiconductor device | Tadashi Takasaki, Hiroshi Ashihara, Atsushi Sano, Naonori Akae, Hidehiro Yanai | 2016-11-29 |
| 9502236 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Yukitomo HIROCHI, Kazuhiro Morimitsu, Taketoshi Sato, Tetsuo Yamamoto | 2016-11-22 |
| 9487863 | Substrate processing apparatus | Shun MATSUI, Kazuhiro Morimitsu | 2016-11-08 |
| 9431220 | Substrate processing apparatus and substrate processing system | Naofumi Ohashi, Masanori NAKAYAMA, Atsuhiko Suda, Shun MATSUI | 2016-08-30 |
| 9373499 | Batch-type remote plasma processing apparatus | Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2016-06-21 |
| 9171734 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Shun MATSUI | 2015-10-27 |
| 9163309 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tetsuo Yamamoto, Kazuhiro Morimitsu, Kenji Ono, Tadashi Takasaki, Ikuo Hirose +1 more | 2015-10-20 |
| 9070554 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yukitomo HIROCHI, Tetsuo Yamamoto, Kazuhiro Morimitsu, Tadashi Takasaki | 2015-06-30 |
| 9064695 | Substrate processing apparatus, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Yukitomo HIROCHI, Kazuhiro Morimitsu, Taketoshi Sato, Tetsuo Yamamoto | 2015-06-23 |
| 9039912 | Batch-type remote plasma processing apparatus | Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2015-05-26 |
| 9023429 | Method of manufacturing semiconductor device and substrate processing apparatus | Yuichiro TAKESHIMA, Osamu Kasahara, Junichi Tanabe, Katsuhiko Yamamoto, Hisashi Nomura | 2015-05-05 |
| 8925562 | Substrate processing apparatus and method of manufacturing semiconductor device | Tadashi Takasaki, Hiroshi Ashihara, Atsushi Sano, Naonori Akae, Hidehiro Yanai | 2015-01-06 |
| 8544411 | Batch-type remote plasma processing apparatus | Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2013-10-01 |
| 8518182 | Substrate processing apparatus | Shizue Ogawa, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2013-08-27 |
| 8261692 | Substrate processing apparatus and reaction container | Tadashi Kontani, Taketoshi Sato, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more | 2012-09-11 |