Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948778 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Shin Hiyama, Toru Kakuda, Toshiya Shimada, Tomihiro Amano | 2024-04-02 |
| 11530481 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Naofumi Ohashi, Tadashi Takasaki | 2022-12-20 |
| 11101111 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Shin Hiyama, Toru Kakuda, Toshiya Shimada, Tomihiro Amano | 2021-08-24 |
| 10763084 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Shin Hiyama, Toru Kakuda, Toshiya Shimada, Tomihiro Amano | 2020-09-01 |
| 10403478 | Plasma processing apparatus and method of manufacturing semiconductor device | Shin Hiyama, Toshiya Shimada, Yukinori Aburatani | 2019-09-03 |
| 10287684 | Substrate processing apparatus | — | 2019-05-14 |
| 9911580 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Shin Hiyama, Toru Kakuda, Toshiya Shimada, Tomihiro Amano | 2018-03-06 |
| 9659767 | Substrate processing apparatus and method of manufacturing semiconductor device | Hiroshi Ashihara, Atsushi Sano, Tadashi Takasaki | 2017-05-23 |
| 9508546 | Method of manufacturing semiconductor device | Kazuyuki Toyoda, Tadashi Takasaki, Hiroshi Ashihara, Atsushi Sano, Naonori Akae | 2016-11-29 |
| 9378991 | Substrate processing apparatus and substrate processing method | Akira Takahashi, Masakazu Sakata | 2016-06-28 |
| 9082797 | Substrate processing apparatus and method of manufacturing semiconductor device | Yukinori Aburatani, Toshiya Shimada, Kenji Shinozaki, Tomihiro Amano, Hiroshi Ashihara +2 more | 2015-07-14 |
| 9076644 | Substrate processing apparatus, substrate supporter and method of manufacturing semiconductor device | Masakazu Sakata | 2015-07-07 |
| 8986450 | Substrate processing apparatus and method of manufacturing semiconductor device | Hiroshi Ashihara, Atsushi Sano, Tadashi Takasaki | 2015-03-24 |
| 8925562 | Substrate processing apparatus and method of manufacturing semiconductor device | Kazuyuki Toyoda, Tadashi Takasaki, Hiroshi Ashihara, Atsushi Sano, Naonori Akae | 2015-01-06 |
| 8444363 | Substrate processing apparatus | Masakazu Sakata, Akira Takahashi, Motonari Takebayashi, Shinya Tanaka | 2013-05-21 |
| 7923380 | Substrate processing apparatus and substrate processing method | Masakazu Sakata, Akira Takahashi | 2011-04-12 |
| 7648578 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hideharu Itatani, Sadayoshi Horii | 2010-01-19 |
| 7579276 | Substrate processing apparatus and method of manufacturing semiconductor device | Hideharu Itatani, Sadayoshi Horii, Atsushi Sano | 2009-08-25 |