Issued Patents All Time
Showing 1–25 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424409 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Teruo Yoshino, Tadashi Takasaki | 2025-09-23 |
| 12392032 | Substrate processing apparatus with cleaning of exhaust system | Yoshihiko YANAGISAWA, Tadashi Takasaki, Shun MATSUI | 2025-08-19 |
| 12387949 | Substrate processing apparatus | Teruo Yoshino, Tadashi Takasaki | 2025-08-12 |
| 12327755 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Toshiyuki Kikuchi, Tadashi Takasaki | 2025-06-10 |
| 12327720 | Method of processing substrate, substrate processing apparatus, recording medium, and manufacturing semiconductor device | Toshiyuki Kikuchi | 2025-06-10 |
| 12320778 | Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium | Teruo Yoshino, Toshiro Koshimaki | 2025-06-03 |
| 12224185 | Method of manufacturing semiconductor device | Hideharu Itatani, Toshiyuki Kikuchi | 2025-02-11 |
| 12165894 | Processing method, method of manufacturing semiconductor, and substrate processing apparatus | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2024-12-10 |
| 12131902 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yukinori Aburatani, Tetsuo Yamamoto | 2024-10-29 |
| 12106998 | Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Teruo Yoshino, Masanori NAKAYAMA | 2024-10-01 |
| 12093021 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Toshiyuki Kikuchi, Shun MATSUI, Tadashi Takasaki | 2024-09-17 |
| 12091751 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomihiro Amano, Satoshi Takano | 2024-09-17 |
| 11967513 | Substrate processing apparatus | Teruo Yoshino, Tadashi Takasaki | 2024-04-23 |
| 11926893 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium therefor | Tetsuaki INADA | 2024-03-12 |
| 11923173 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Teruo Yoshino, Tadashi Takasaki | 2024-03-05 |
| 11891697 | Substrate processing apparatus | Takashi Yahata, Yukinori Aburatani, Shun MATSUI | 2024-02-06 |
| 11841343 | Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium | Teruo Yoshino, Toshiro Koshimaki | 2023-12-12 |
| 11749550 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2023-09-05 |
| 11747789 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Toshiyuki Kikuchi, Shun MATSUI, Tadashi Takasaki | 2023-09-05 |
| 11728183 | Method of manufacturing semiconductor device | Hideharu Itatani, Toshiyuki Kikuchi | 2023-08-15 |
| 11664205 | Substrate processing apparatus | — | 2023-05-30 |
| 11600488 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi | 2023-03-07 |
| 11538661 | Substrate processing apparatus | Teruo Yoshino, Tadashi Takasaki | 2022-12-27 |
| 11530481 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hidehiro Yanai, Tadashi Takasaki | 2022-12-20 |
| 11521848 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yukinori Aburatani, Tetsuo Yamamoto | 2022-12-06 |