Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320778 | Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium | Teruo Yoshino, Naofumi Ohashi | 2025-06-03 |
| 11869790 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yuji Takebayashi | 2024-01-09 |
| 11841343 | Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium | Teruo Yoshino, Naofumi Ohashi | 2023-12-12 |
| 11094572 | Substrate processing apparatus and recording medium | Osamu Morita, Yuji Yamaoka, Shuichi Kubo, Hiroyuki KITAMOTO | 2021-08-17 |
| 10289781 | Management apparatus, substrate processing system and non-transitory computer-readable recording medium | Kazuhide Asai, Hideto Shimizu, Kayoko Yashiki, Kazuyoshi Yamamoto, Nobuhisa Makino | 2019-05-14 |
| 8719230 | Information managing method, information searching method and data displaying method | Kazuhide Asai, Hiroyuki Iwakura, Kayoko Yashiki | 2014-05-06 |
| 8329479 | Information managing method, information managing apparatus and substrate processing system | Kazuhide Asai, Hiroyuki Iwakura, Kayoko Yashiki | 2012-12-11 |
| 8312333 | Substrate processing system and data retrieval method | — | 2012-11-13 |
| 7895207 | Substrate processing system and data retrieval method | — | 2011-02-22 |