Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417049 | Management apparatus, method of processing data, recording medium, method of manufacturing semiconductor device, and processing system | Yusuke Sakamoto, Kayoko Yashiki, Osamu Ueda, Shuai Yuan | 2025-09-16 |
| 12341000 | Substrate processing apparatus and recording medium | Masanori OKUNO, Hideki Horita, Kazuyoshi Yamamoto, Toshihiko Yonejima | 2025-06-24 |
| 11996337 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kazuyoshi Yamamoto, Hidemoto Hayashihara, Kayoko Yashiki | 2024-05-28 |
| 11966210 | Substrate processing apparatus, device management controller, and recording medium | Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Kayoko Yashiki, Yukio Miyata +4 more | 2024-04-23 |
| 11782425 | Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium | Kazuyoshi Yamamoto, Hidemoto Hayashihara, Mitsuru Fukuda, Kayoko Yashiki, Takayuki KAWAGISHI +1 more | 2023-10-10 |
| 11387152 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kazuyoshi Yamamoto, Hidemoto Hayashihara, Kayoko Yashiki | 2022-07-12 |
| 11237538 | Substrate processing apparatus, device management controller, and recording medium | Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Kayoko Yashiki, Yukio Miyata +4 more | 2022-02-01 |
| 11236743 | Substrate processing apparatus and recording medium | Masanori OKUNO, Hideki Horita, Kazuyoshi Yamamoto, Toshihiko Yonejima | 2022-02-01 |
| 11086304 | Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis | Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Hidemoto Hayashihara, Kayoko Yashiki, Hiroyuki Iwakura | 2021-08-10 |
| 10937676 | Substrate processing apparatus and device management controller | Hidemoto Hayashihara, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki, Hiroyuki Iwakura | 2021-03-02 |
| 10903098 | Substrate processing system and substrate processing apparatus | Akihiko Yoneda, Tetsuyuki MAEDA, Naoya Miyashita, Nobuyuki Miyakawa, Tadashi Okazaki +1 more | 2021-01-26 |
| 10860005 | Substrate processing apparatus and non-transitory computer-readable recording medium | Hiroyuki Iwakura, Hidemoto Hayashihara, Mitsuru Fukuda, Kazuyoshi Yamamoto, Kayoko Yashiki +1 more | 2020-12-08 |
| 10496078 | Substrate processing system, substrate processing apparatus and management device | Kazuyoshi Yamamoto, Osamu Ueda | 2019-12-03 |
| 10289781 | Management apparatus, substrate processing system and non-transitory computer-readable recording medium | Toshiro Koshimaki, Hideto Shimizu, Kayoko Yashiki, Kazuyoshi Yamamoto, Nobuhisa Makino | 2019-05-14 |
| 10211110 | Method of manufacturing semiconductor device | Tsukasa Kamakura | 2019-02-19 |
| 9581996 | Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process | Hideto Shimizu, Kayoko Yashiki | 2017-02-28 |
| 9400794 | Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus | Osamu Ueda, Hiroyuki Iwakura | 2016-07-26 |
| 9142436 | Statistical analysis method and substrate process system | — | 2015-09-22 |
| 8948899 | Substrate processing system, substrate processing apparatus and display method of substrate processing apparatus | — | 2015-02-03 |
| 8719230 | Information managing method, information searching method and data displaying method | Hiroyuki Iwakura, Toshiro Koshimaki, Kayoko Yashiki | 2014-05-06 |
| 8639367 | Substrate processing system | — | 2014-01-28 |
| 8538571 | Substrate processing system, group managing apparatus, and method of analyzing abnormal state | Hiroyuki Iwakura, Kazuyoshi Yamamoto | 2013-09-17 |
| 8447424 | Substrate processing system and group management system | Hiroyuki Iwakura | 2013-05-21 |
| 8329479 | Information managing method, information managing apparatus and substrate processing system | Hiroyuki Iwakura, Toshiro Koshimaki, Kayoko Yashiki | 2012-12-11 |
| 7813828 | Substrate processing system and group management system | Hiroyuki Iwakura | 2010-10-12 |