Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065736 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Koei KURIBAYASHI, Tomoshi Taniyama | 2024-08-20 |
| 11788188 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Koei KURIBAYASHI, Tomoshi Taniyama | 2023-10-17 |
| 11104997 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama | 2021-08-31 |
| 10903098 | Substrate processing system and substrate processing apparatus | Akihiko Yoneda, Kazuhide Asai, Tetsuyuki MAEDA, Nobuyuki Miyakawa, Tadashi Okazaki +1 more | 2021-01-26 |
| 10340164 | Substrate processing apparatus, method of measuring temperature of substrate processing apparatus and non-transitory computer-readable recording medium | Akihito Watanabe, Katsumi Takashima, Shigeru Honda | 2019-07-02 |
| 5924747 | Coupling for use with container valve | — | 1999-07-20 |
| 4685707 | Superfine finish piping joint | — | 1987-08-11 |