Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398460 | Substrate processing apparatus, furnace opening assembly, substrate processing method, method of manufacturing semiconductor device and non-transitory tangible medium | Tatsuya NISHINO, Akinori Tanaka, Akira HORII | 2025-08-26 |
| 12123091 | Substrate processing apparatus and method of manufacturing semiconductor device | Takayuki Nakada, Takashi Nogami, Daigi KAMIMURA | 2024-10-22 |
| 12116666 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Takeshi Ito | 2024-10-15 |
| 12065736 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Naoya Miyashita, Koei KURIBAYASHI | 2024-08-20 |
| 12062546 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Takayuki Nakada | 2024-08-13 |
| 11935762 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Daigi KAMIMURA, Kenji Shirako, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2024-03-19 |
| 11913116 | Substrate processing apparatus and method of manufacturing semiconductor device | Motoya Takewaki | 2024-02-27 |
| 11788188 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Naoya Miyashita, Koei KURIBAYASHI | 2023-10-17 |
| 11512392 | Substrate processing apparatus | Takayuki Nakada, Takashi Nogami, Daigi KAMIMURA | 2022-11-29 |
| 11495477 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada | 2022-11-08 |
| 11456190 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Takashi Nogami | 2022-09-27 |
| 11450536 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Kenji Shirako, Hironori Shimada, Akira HORII, Takayuki Nakada +1 more | 2022-09-20 |
| 11396700 | Substrate processing apparatus | Sadao Hisakado | 2022-07-26 |
| 11222796 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada | 2022-01-11 |
| D939459 | Boat for wafer processing apparatus | Hironori Shimada, Daigi KAMIMURA, Shuhei Saido, Takafumi Sasaki | 2021-12-28 |
| 11155920 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hidenari Yoshida, Takayuki Nakada | 2021-10-26 |
| 11124873 | Substrate processing apparatus | Takayuki Nakada, Kenji Shirako | 2021-09-21 |
| 11104997 | Substrate processing apparatus and method of manufacturing semiconductor device | Naoya Miyashita | 2021-08-31 |
| 11062918 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Takashi Nogami | 2021-07-13 |
| 10950457 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Takayuki Nakada | 2021-03-16 |
| 10811271 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Shigeru Odake, Takayuki Nakada | 2020-10-20 |
| 10689758 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hidenari Yoshida, Takayuki Nakada | 2020-06-23 |
| 10636681 | Substrate processing apparatus and method of manufacturing semiconductor device | Daigi KAMIMURA, Takashi Nogami | 2020-04-28 |
| 10615061 | Substrate processing apparatus | Shuhei Saido, Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada | 2020-04-07 |
| 10590531 | Substrate processing apparatus, and method of manufacturing semiconductor device | Kenji Shirako | 2020-03-17 |