Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062546 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Tomoshi Taniyama, Takayuki Nakada | 2024-08-13 |
| 10950457 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Tomoshi Taniyama, Takayuki Nakada | 2021-03-16 |
| 10811271 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Hidenari Yoshida, Tomoshi Taniyama, Takayuki Nakada | 2020-10-20 |
| 10403528 | Substrate-processing apparatus and method of manufacturing semiconductor device | Yasuaki Komae, Takashi Nogami, Tomoshi Taniyama | 2019-09-03 |
| 9966289 | Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium | Daigi KAMIMURA, Tomoshi Taniyama, Takashi Nogami, Osamu Morita, Yasuaki Komae | 2018-05-08 |
| 6251189 | Substrate processing apparatus and substrate processing method | Naoki Matsumoto, Shinya Morita, Kouji Tometsuka | 2001-06-26 |