Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8173214 | Substrate processing method | — | 2012-05-08 |
| 7553518 | Substrate processing method | — | 2009-06-30 |
| 7003219 | Substrate processing method | — | 2006-02-21 |
| 6923867 | Substrate processing apparatus and method for manufacturing semiconductor device | Tomoshi Taniyama, Shusaku Yanagawa | 2005-08-02 |
| 6780251 | Substrate processing apparatus and method for fabricating semiconductor device | — | 2004-08-24 |
| 6712909 | Substrate processing apparatus and method for manufacturing semiconductor device | — | 2004-03-30 |
| 6540465 | Substrate processing apparatus | — | 2003-04-01 |
| 6527884 | Hydrogen annealing process and apparatus therefor | Yasunori Takakuwa | 2003-03-04 |
| 6495473 | Substrate processing apparatus and method of manufacturing semiconductor device | Tomoshi Taniyama | 2002-12-17 |
| 6482753 | Substrate processing apparatus and method for manufacturing semiconductor device | — | 2002-11-19 |
| 6332898 | Substrate processing apparatus and maintenance method therefor | Mitsuhiro Hirano, Tetsuya Marubayashi | 2001-12-25 |
| 6318944 | Semiconductor fabricating apparatus, method for modifying positional displacement of a wafer in a wafer cassette within the semiconductor fabricating apparatus and method for transferring the wafer cassette | Kazuhiro Shimeno, Shigeo Ohba | 2001-11-20 |
| 6251189 | Substrate processing apparatus and substrate processing method | Shigeru Odake, Naoki Matsumoto, Shinya Morita | 2001-06-26 |
| 6143040 | Substrate processing apparatus and maintenance method therefor | Mitsuhiro Hirano, Tetsuya Marubayashi | 2000-11-07 |
| 5669644 | Wafer transfer plate | Hideki Kaihotsu, Kazuhiro Shimeno | 1997-09-23 |