Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Tetsuaki INADA, Yuichi Wada, Mitsunori Ishisaka, Sadayoshi Horii, Hideharu Itatani +2 more | 2020-03-31 |
| 9111972 | Substrate processing apparatus and manufacturing method for a semiconductor device | Mitsunori Takeshita, Tomoyuki Matsuda, Akihiro Sato, Shinya Morita, Toshimitsu Miyata +1 more | 2015-08-18 |
| 8816759 | Electric circuit and semiconductor device | Shuji Hamada | 2014-08-26 |
| 7660753 | Inventory control system, inventory control method, fee collection method utilized in inventory control system, inventory control program, and storage medium | Toshiyuki Sakuma, Mitsuhiro Enomoto, Hideyuki Sasaki, Yuichi Kaneko | 2010-02-09 |
| 7516383 | Method and apparatus for analyzing delay in circuit, and computer product | — | 2009-04-07 |
| 6332898 | Substrate processing apparatus and maintenance method therefor | Kouji Tometsuka, Tetsuya Marubayashi | 2001-12-25 |
| 6264706 | Substrate processing apparatus with local exhaust for removing contaminants | — | 2001-07-24 |
| 6143040 | Substrate processing apparatus and maintenance method therefor | Kouji Tometsuka, Tetsuya Marubayashi | 2000-11-07 |
| 5810538 | Semiconductor manufacturing equipment and method for carrying wafers in said equipment | Makoto Ozawa | 1998-09-22 |
| 5277215 | Method for supplying and discharging gas to and from semiconductor manufacturing equipment and system for executing the same | Hidehiro Yanagawa, Hiroyuki Nishiuchi, Masakazu Shimada, Tomoshi Taniyama, Kazumi Nikaido +2 more | 1994-01-11 |