Issued Patents All Time
Showing 25 most recent of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148629 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Ananthkrishna Jupudi +1 more | 2024-11-19 |
| 12100577 | High conductance inner shield for process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2024-09-24 |
| 12080522 | Preclean chamber upper shield with showerhead | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2024-09-03 |
| 11913107 | Methods and apparatus for processing a substrate | Yueh Sheng Ow, Junqi Wei, Kang Zhang, Kelvin Boh | 2024-02-27 |
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yueh Sheng Ow, Junqi Wei, Kang Zhang, Ananthkrishna Jupudi, Sarath Babu +2 more | 2024-01-23 |
| 11862480 | Shutter disk | Kang Zhang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Ananthkrishna Jupudi +1 more | 2024-01-02 |
| 11629409 | Inline microwave batch degas chamber | Ribhu Gautam, Ananthkrishna Jupudi, Tuck Foong Koh, Preetham Rao, Vinodh Ramachandran +3 more | 2023-04-18 |
| 11610807 | Methods and apparatus for cleaving of semiconductor substrates | Felix Deng, Yueh Sheng Ow, Tuck Foong Koh, Nuno Yen-Chu Chen, Sree Rangasai V. Kesapragada +1 more | 2023-03-21 |
| 11587799 | Methods and apparatus for processing a substrate | Chien-Kang HSIUNG, Glen T. Mori | 2023-02-21 |
| 11569122 | Methods and apparatus for cleaving of semiconductor substrates | Felix Deng, Yueh Sheng Ow, Tuck Foong Koh, Nuno Yen-Chu Chen, Sree Rangasai V. Kesapragada +1 more | 2023-01-31 |
| 11557499 | Methods and apparatus for prevention of component cracking using stress relief layer | Kok Wei Tan, Chul Nyoung Lee, Siew Kit Hoi, Xinxin Wang, Zheng Min Clarence Chong +2 more | 2023-01-17 |
| D973609 | Upper shield with showerhead for a process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2022-11-29 |
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Takatomo Yamaguchi, Shuhei Saido | 2022-06-14 |
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yueh Sheng Ow, Ananthkrishna Jupudi, Clinton GOH, Kai Liang Liew, Sarath Babu | 2022-03-29 |
| 11171017 | Shutter disk | Zhang Kang, Junqi Wei, Yueh Sheng Ow, Kelvin Boh, Ananthkrishna Jupudi +1 more | 2021-11-09 |
| D931241 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2021-09-21 |
| 10991617 | Methods and apparatus for cleaving of semiconductor substrates | Felix Deng, Yueh Sheng Ow, Tuck Foong Koh, Nuno Yen-Chu Chen, Sree Rangasai V. Kesapragada +1 more | 2021-04-27 |
| D913979 | Inner shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2021-03-23 |
| 10677830 | Methods and apparatus for detecting microwave fields in a cavity | Ananthkrishna Jupudi, Yueh Sheng Ow, Jacob Newman, Preetham Rao, Vinodh Ramachandran | 2020-06-09 |
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Tetsuaki INADA, Mitsunori Ishisaka, Mitsuhiro Hirano, Sadayoshi Horii, Hideharu Itatani +2 more | 2020-03-31 |
| 10597780 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Takatomo Yamaguchi, Shuhei Saido | 2020-03-24 |
| 10480069 | Storage device, vaporizer and substrate processing apparatus | Naoko Kitagawa | 2019-11-19 |
| 9957616 | Substrate processing apparatus and heating unit | Hitoshi Murata, Takashi Yahata, Hidenari Yoshida, Shuhei Saido | 2018-05-01 |
| 9816182 | Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium | Hideto Tateno, Hiroshi Ashihara, Keishin Yamazaki, Takurou Ushida, Iwao Nakamura +1 more | 2017-11-14 |