Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424415 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takayuki Sato | 2025-09-23 |
| 12230474 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi | 2025-02-18 |
| 11926893 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium therefor | Naofumi Ohashi | 2024-03-12 |
| D981970 | Substrate mounting plate for substrate processing apparatus | Takeshi Yasui | 2023-03-28 |
| 11499224 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hideto Tateno | 2022-11-15 |
| 11473196 | Substrate processing apparatus | Naofumi Ohashi | 2022-10-18 |
| 11035037 | Substrate processing apparatus and metal member | Takuya JODA, Daisuke Hara | 2021-06-15 |
| 10685832 | Substrate processing apparatus | Naofumi Ohashi, Shun MATSUI | 2020-06-16 |
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Yuichi Wada, Mitsunori Ishisaka, Mitsuhiro Hirano, Sadayoshi Horii, Hideharu Itatani +2 more | 2020-03-31 |
| 9546422 | Semiconductor device manufacturing method and substrate processing method including a cleaning method | Yoshihiko YANAGISAWA | 2017-01-17 |
| 5960159 | Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety | Fumihide Ikeda, Junichi Machida, Masayuki Tomita, Yasuhiro Inokuchi, Kazuhiro Shimeno +1 more | 1999-09-28 |