Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421609 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsuro SEINO, Arito OGAWA | 2025-09-23 |
| 12148614 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Arito OGAWA, Norikazu Mizuno, Shogo HAYASAKA, Koei KURIBAYASHI | 2024-11-19 |
| 12084760 | Method of processing substrate, recording medium, substrate processing apparatus, and method of manufacturing semiconductor device | Arito OGAWA, Atsuro SEINO | 2024-09-10 |
| 12087598 | Substrate processing apparatus | Hideto Tateno, Daisuke Hara, Masahisa Okuno, Takashi Tsukamoto, Akinori Tanaka +2 more | 2024-09-10 |
| 12000045 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method | Yukinao KAGA, Yoshimasa NAGATOMI | 2024-06-04 |
| 11168396 | Method of manufacturing semiconductor device and recording medium | Toru Kakuda, Masahisa Okuno, Katsuhiko Yamamoto, Sadayoshi Horii | 2021-11-09 |
| 11035037 | Substrate processing apparatus and metal member | Tetsuaki INADA, Daisuke Hara | 2021-06-15 |
| 10985017 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuhiko Yamamoto, Toru Kakuda, Sadayoshi Horii | 2021-04-20 |
| 9793112 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Toru Kakuda, Masahisa Okuno, Hideto Tateno | 2017-10-17 |
| 9646862 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuyoshi Hamano, Atsushi UMEKAWA, Akinori Ishii, Masahisa Okuno | 2017-05-09 |
| 9502239 | Substrate processing method, substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masahisa Okuno, Tooru Kakuda, Hideto Tateno, Masamichi KUROKAWA | 2016-11-22 |
| D741823 | Vaporizer for substrate processing apparatus | Hideto Tateno, Daisuke Hara, Masahisa Okuno | 2015-10-27 |